A bandwidth enhanced method of a low-profile substrate integrated waveguide (SIW) cavity-backed slot antenna is presented in this paper. Bandwidth enhancement is achieved by simultaneously exciting two hybrid modes in the SIW-backed cavity and merging them within the required frequency range. These two hybrid modes, whose dominant fields are located in different half parts of the SIW cavity, are two different combinations of the and resonances. This design method has been validated by experiments. Compared with those of a previously presented SIW cavity-backed slot antenna, fractional impedance bandwidth of the proposed antenna is enhanced from 1.4% to 6.3%, its gain and radiation efficiency are also slightly improved to 6.0 dBi and 90%, and its SIW cavity size is reduced about 30%. The proposed antenna exhibits low cross polarization level and high front to back ratio. It still retains advantages of low-profile, low fabrication cost, and easy integration with planar circuits.Index Terms-Bandwidth enhanced, cavity-backed slot antenna, hybrid modes, substrate integrated waveguide (SIW).