2016
DOI: 10.1088/1674-1056/25/4/048104
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Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria

Abstract: Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceriaXiang He(何祥), Gang Wang(王刚), Heng Zhao(赵恒), and Ping Ma(马平) †

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Cited by 17 publications
(8 citation statements)
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“…Since the DIC images are much more sensitive to small dots and shallow scratches than normal bright field images. [18] Combining HF etching and DIC images were used to analyze the subsurface damages in polished surfaces. To obtain the subsurface damage density, ten DIC images (650 µm×480 µm) of each sample are recorded at evenly spaced after the HF etching process by a Leica DM4000M optical microscope.…”
Section: Methodsmentioning
confidence: 99%
“…Since the DIC images are much more sensitive to small dots and shallow scratches than normal bright field images. [18] Combining HF etching and DIC images were used to analyze the subsurface damages in polished surfaces. To obtain the subsurface damage density, ten DIC images (650 µm×480 µm) of each sample are recorded at evenly spaced after the HF etching process by a Leica DM4000M optical microscope.…”
Section: Methodsmentioning
confidence: 99%
“…22 Moreover, Vickers indentations have been proven effective in modeling the surface defects on the machined fused silica surfaces to study the effects of surface defects in previous work. 24,31,32,52,53 Thus, Vickers indentations can be chosen to model the surface defects in this work. Similarly, Knoop indentations and some machined surface cracks have the same formation mechanisms.…”
Section: Defect Preparationmentioning
confidence: 99%
“…Defects in fused silica optical elements play an important role in laser-induced fused silica damage. [14][15][16][17][18][19][20][21] Therefore, it is of great significance to characterize the internal defects of fused silica optical elements. In the experiment, surface damage morphology of optical element is observed by optical microscopy and scanning electron microscopy.…”
Section: Introductionmentioning
confidence: 99%