Subsurface microscopy of biased metal-oxide-semiconductor field-effect-transistor structures: photothermal and electroreflectance images

Batista, José Eduardo; Mansanares, A. M.; Silva, E.C. da; Pimentel, Marcos; Jannuzzi, N.; Fournier, Danièle

doi:10.1016/s0924-4247(98)00169-1

Cited by 9 publications

(4 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Previous experiments have used this technique for point measurements [2,3] and thermal mapping has been achieved by scanning a laser [4,5].…”

Section: Thermoreflectance Techniquementioning

confidence: 99%

“…In addition, radiation from large areas in the scene buries the signal from small regions on the order of a micron Many measurement techniques have been proposed [1] for high-resolution thermal imaging applications that exploit different temperature dependent properties of materials. By using the thermoreflectance [2][3][4][5][6] method, we show that real time, thermal images with sub-micron spatial resolution, and 100mK thermal resolution can be generated on active semiconductor devices. We will see how experimental results on micro-coolers, and microheaters provide design engineers with important information to optimize the device geometry.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Christofferson¹,

Vashaee²,

Shakouri³

et al. 2001

View full text Add to dashboard Cite

Thermal measurements on a sub-micron scale are non-trivial, but are important for the characterization of modern semiconductor and opto-electronic devices. In this paper we will discuss the application of the thermoreflectance method for real time sub-micron thermal imaging. By using light in the visible spectrum, the diffraction limit, and thus spatial resolution is improved over a traditional infrared camera based on blackbody emission. With active excitation of the sample and frequency domain filtering, thermal images with 100mK temperature resolution are obtained.Experiments performed on semiconductor micro-coolers and micro-heaters are presented.

show abstract

“…Previous experiments have used this technique for point measurements [2,3] and thermal mapping has been achieved by scanning a laser [4,5].…”

Section: Thermoreflectance Techniquementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Christofferson¹,

Vashaee²,

Shakouri³

et al. 2001

View full text Add to dashboard Cite

show abstract

“…For our purposes, line scans are sufficient, so a silicon p-n photodiode detector is used, opposed to an expensive CCD camera. To obtain the sensitivity needed to detect the small changes in reflectance on the order of the thermoreflectance constant, a lock-in amplification scheme is used [5]. The heating of the metal line is temporally modulated with a square wave pulse.…”

Section: Methodsmentioning

confidence: 99%

High-resolution thermoreflectance microscopy

et al. 2002

View full text Add to dashboard Cite

We present very high-resolution thermal microscopy using the technique of thermoreflectance, a non-contact measurement of the temperature in and around active semiconductor devices. By measuring the local change in reflectivity and comparing to the optical index versus temperature for the interface materials, thermoreflectance can determine the local temperature distribution. Thermoreflectance allows us to work at wavelengths much smaller than those used in typical blackbody imaging, and thus the spatial resolution is significantly improved over that of traditional thermal microscopy. In our experimental setup, we have a confocal scanning optical microscope with a tunable laser, where reflected light is detected by a silicon photodiode in a heterodyne scheme. The sample consists of a 600 nm wide poly-silicon wire embedded in silicon dioxide on top of a silicon substrate. Varying the amount and temporal shape of the current through the poly-silicon wire, we generate a controlled thermal profile to test the imaging capability. Our preliminary results indicate sub-micron thermal resolution.

show abstract

“…In particular experiments by Goodson [3], Quintard [4] and Claeys [5] have shown good single point results on metal trace experiments and also several experiments by Mansares [6] and Batista [7] have shown thermal imaging with a scanning method. The thermoreflectance technique exploits the change in the reflection coefficient of material with temperature.…”

Section: Thermoreflectance Techniquesmentioning

confidence: 99%

Thermoreflectance imaging of superlattice micro refrigerators

Christofferson

Vashaee²,

Shakouri

et al.

Seventeenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (Cat. No.01CH37189)

View full text Add to dashboard Cite

High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental setup, we expect to obtain thermal images with sub-micron spatial resolution. IntroductionFor various applications in optoelectronic or high power electronic devices, it is useful to control the temperature on a microscopic scale. For example, semiconductor lasers used in wavelength division multiplexed fiber optics communication systems require less than a degree centigrade variation in their operating temperature in order to have stable wavelength and output power. The traditional thermoelectric effect that can provide cooling at the interface between two materials can be enhanced using thermionic emission in superlattice barriers [1,2].By integrating these heterostructure integrated thermionic (HIT) micro coolers with lasers, and other optoelectronic devices, we can have active temperature control on a small scale thus improving the reliability of thermally sensitive components.Room temperature thermocouple measurements show 4 degrees centigrade of cooling on the surface of the cooler. However, since the size of the microcoolers can be smaller then the thermocouple, and the measurement is effected by the thermal mass of the thermocouple, non-contact high-resolution characterization methods are preferred.

show abstract

Subsurface microscopy of biased metal-oxide-semiconductor field-effect-transistor structures: photothermal and electroreflectance images

Cited by 9 publications

References 10 publications

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

High-resolution thermoreflectance microscopy

Thermoreflectance imaging of superlattice micro refrigerators

Contact Info

Product

Resources

About