2001
DOI: 10.1046/j.1365-2818.2001.00767.x
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Subsurface nanoindentation deformation of Cu–Al multilayers mapped in 3D by focused ion beam microscopy

Abstract: SummaryA new technique for the three-dimensional analysis of subsurface damage of nanocomposites is presented. Cu±Al multilayers, grown epitaxially on (0001)Al 2 O 3 single crystals by ultra high vacuum molecular beam epitaxy, have been deformed by nanoindentation. Systematic slicing and imaging of the deformed region by focused ion beam microscopy enables a 3D data set of the damaged region to be collected. From this 3D data set, profiles of the deformed sub-surface interfaces can be extracted. This enables t… Show more

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Cited by 78 publications
(38 citation statements)
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“…Among them, the focused ion beam (FIB) technique has shown to be an adequate technique to evaluate the microstructure and to characterize damage on materials [32][33][34][35]. Fruitful examples of its implementation in cemented carbides have been recently reported.…”
Section: Introductionmentioning
confidence: 99%
“…Among them, the focused ion beam (FIB) technique has shown to be an adequate technique to evaluate the microstructure and to characterize damage on materials [32][33][34][35]. Fruitful examples of its implementation in cemented carbides have been recently reported.…”
Section: Introductionmentioning
confidence: 99%
“…[20][21][22][23] In recent years, the use of focused ion beam (FIB) has enabled more accurate scanning electron microscope (SEM) imaging, [24][25][26] as well as crystal orientation mapping using electron backscatter diffraction (EBSD) 27,28 and transmission electron microscopy (TEM). 29,30 Scanning X-ray microdiffraction (µSXRD) using a focused polychromatic/white synchrotron X-ray beam can be used to determine the lattice rotation which is directly related to the local lattice curvature, 31 strain gradients, and the GND density.…”
Section: Introductionmentioning
confidence: 99%
“…Thin film single crystals have previously been observed to form new grains after ex-situ nanoindentation [13]. The grains formed here during the in-situ compression of the nanopillars also appear to have undergone grain rotation as the deformation progressed.…”
Section: Deformation Mechanismsmentioning
confidence: 72%