Subwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source

Gardner, Dennis F.; Tanksalvala, Michael; Shanblatt, Elisabeth R.; Zhang, Xiaoshi; Galloway, Benjamin; Porter, Christina L.; Karl, Robert; Bevis, Charles; Adams, Daniel E.; Kapteyn, Henry C.; Murnane, Margaret M.; Mancini, Giulia F.

doi:10.1038/nphoton.2017.33

Cited by 190 publications

(101 citation statements)

References 48 publications

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“…This was represented with a l × l = 72 × 72 pixel with 1 nm pixel size. We considered an object described below (200 nm in extent, sampled on a 3D grid with n × n × n =256 × 256 × 256) that is enough to go beyond the pure projection approximation at the chosen spatial resolution (1 nm voxel size, since sub-wavelength resolution imaging has been demonstrated with ptychography [18]), forcing us to account for beam propagation effects within the specimen. In other words, the “depth of focus” of diffraction effects within the object is found from Eq.…”

Section: Demonstrationmentioning

confidence: 99%

“…One can even reconstruct multiple probe function modes to account for x-ray beam partial coherence [8], sample vibration [9], and continuously moving illumination [10–13]. Ptychography has been used to image thin circuit layers through 300 μ m of silicon at 12 nm resolution [14], sub-10 nm resolution has been achieved with thinner specimens [15–17], and sub-wavelength resolution has been obtained using EUV light [18]. …”

Section: Introductionmentioning

confidence: 99%

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3D x-ray imaging of continuous objects beyond the depth of focus limit

Gilles¹,

Nashed²,

Du³

et al. 2018

Optica

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X-ray ptychography is becoming the standard method for sub-30 nm imaging of thick extended samples. Available algorithms and computing power have traditionally restricted sample reconstruction to 2D slices. We build on recent progress in optimization algorithms and high performance computing to solve the ptychographic phase retrieval problem directly in 3D. Our approach addresses samples that do not fit entirely within the depth of focus of the imaging system. Such samples pose additional challenges because of internal diffraction effects within the sample. We demonstrate our approach on a computational sample modeled with 17 million complex variables.

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Section: Demonstrationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

3D x-ray imaging of continuous objects beyond the depth of focus limit

Gilles¹,

Nashed²,

Du³

et al. 2018

Optica

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“…The cells that generate coronary arteries originate from various regions of the embryo, including a sac-like structure called the sinus venosus that adjoins the embryonic heart 5,6 . From these sites, the cells invade the heart's muscle-cell layer.…”

Section: John Rodenburg Is In the Departmentmentioning

confidence: 99%

A record-breaking microscope

Rodenburg¹

2018

Nature

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“…The overlap of the illumination probes not only reduces the oversampling requirement, but also improves the convergence speed of the iterative process. By taking advantage of ever-improving computational power and advanced detectors, ptychography has been applied to study a wide range of samples using both coherent x-rays and electrons [2,5,[14][15][16][17][18][19][20][21][22][23]. More recently, a time-domain ptychography method was developed by introducing a time-invariant overlapping region as a constraint, allowing the reconstruction of a time series of complex exit wave of dynamic processes with robust and fast convergence [24].…”

Section: Introductionmentioning

confidence: 99%

Semi-implicit relaxed Douglas-Rachford algorithm (sDR) for ptychography

Pham¹,

Rana²,

Miao³

et al. 2019

Opt. Express

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Alternating projection based methods, such as ePIE and rPIE, have been used widely in ptychography. However, they only work well if there are adequate measurements (diffraction patterns); in the case of sparse data (i.e. fewer measurements) alternating projection underperforms and might not even converge. In this paper, we propose semi-implicit relaxed Douglas Rachford (sir-DR), an accelerated iterative method, to solve the classical ptychography problem. Using both simulated and experimental data, we show that sir-DR improves the convergence speed and the reconstruction quality relative to ePIE and rPIE. Furthermore, in certain cases when sparsity is high, sir-DR converges while ePIE and rPIE fail. To facilitate others to use the algorithm, we post the Matlab source code of sir-DR on a public website (www.physics.ucla.edu/research/imaging/sir-DR). We anticipate that this algorithm can be generally applied to the ptychographic reconstruction of a wide range of samples in the physical and biological sciences.

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Subwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source

Cited by 190 publications

References 48 publications

3D x-ray imaging of continuous objects beyond the depth of focus limit

3D x-ray imaging of continuous objects beyond the depth of focus limit

A record-breaking microscope

Semi-implicit relaxed Douglas-Rachford algorithm (sDR) for ptychography

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