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Summary Abstract: A thin-collector Bayard–Alpert gauge for 10−12 Torr vacuum
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Cited by 12 publications
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“…The ion pump current can be used reliably for pressure measurement down to 10* Torr. the ion gauges, having a thin collector of 0.05 mm diameter and an X-ray limit of 5 x 10" 12 Torr [4], can measure vacuum from 10" 3 Torr to high I0 12 Torr.…”
Section: Figurementioning
confidence: 99%
“…The ion pump current can be used reliably for pressure measurement down to 10* Torr. the ion gauges, having a thin collector of 0.05 mm diameter and an X-ray limit of 5 x 10" 12 Torr [4], can measure vacuum from 10" 3 Torr to high I0 12 Torr.…”
Section: Figurementioning
confidence: 99%
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