Summary Abstract: Microspot target development with seeded and patterned plasma polymers

Letts, S.A.; Miller, Danny E.; Corley, R. A.; Tillotson, Thomas M.; Witt, L. A.

doi:10.1116/1.573084

Cited by 3 publications

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“…3, we combine several measurements of the a. versus R by removing the thickness dependence. As the ratio FTqa/F H, increases the films become more stressed [16] and we show here that the surfaces are also rougher. …”

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Surface Roughness Scaling of Plasma Polymer Films

et al. 1994

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Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness o. increases with film thickness 7. as o( f ( ( )rp, and with measurement length L as o(f ) . L ' ) g ') -L, where g is the surface roughness correlation length. At the deposition rate R = 2 p, m/h, the scaling exponents n and P are 0.9 and 0.7, both increasing to 1 at R = I pm/h. A competition between surface relaxation and deposition rate determine o. and (', which increase rapidly with R or inverse temperature. PACS numbers: 68.55.8d, 05.70.Ln, 68.55.Jk Comparison between self-affine surface structure data, computer simulations, and theoretical models is often made using scaling exponents for the rms surface roughness o(L, t) . [1 -3]: t~cL". a(Lr) = (h, (r, i) 2-1/2 h(r, t)(1) where t is the time, r is the position in the plane perpendicular to the growing direction, h(r, t) is the height of the surface at time t and position r, (h(r, t))" is the spatial average of h(r, t), L is the length of the surface measured, and c is a constant. Thus, cr initially scales with time as tP but shows a saturated scaling as I for thick layers [4]. Knowing the functional form of a and P in terms of process conditions allows the prediction of the surface roughness for any sample size.For simple random deposition with no spatial or temporal correlations between the deposited particles (the extreme kinetic limit), P = 0.5, since o. grows as a "random walk, " and n = 0, since there is no saturated scaling with L, For a real surface, relaxation processes such as in the Langevin type models couple the 2 degrees of freedom in the surface roughness, L and t, so as to change the scaling exponents. For example, Edwards and Wilkinson (EW) [5] use a Langevin equation [Eq. (2) with A = 0] to model the evolution of a surface, and find in d = 1 + 1 1 1 dimensions n = 2 and P = 4. In d = 2 + 1 the power law behavior in Eq. (1) changes to a logarithmic dependence. Kardar, Parisi, and Zhang (KPZ) [6] allowed for a component of interface growth parallel to the plane. They used the equation dh(r, t) 2 dt 2 = vV h(r, t) + -[Vh(r, t)] + rl(r, t), (2)where v is related to surface relaxation, g is the random fluctuation in the incoming flux, which is assumed to be Gaussian with delta function correlation (71(r, t) g(r', t')) = 2DB(rr', tt'), and A is the growth velocity perpendicular to the surface. In d = 1 + 1 dimensions they 1 1 obtained the exponents u = 2 and P = 3. In d = 2 + 1, Amar and Family [7] find that when 10~A2D/2v 25, P -0.25 and n -0.4, while for A2D/2v~-1, the effective value of P decreases. This connects the scaling exponent P to the surface relaxation process (v), and the deposition rate (-D). For the growth of plasma polymer films presented here we find 1 & a & 0.9 and 1 & P~0 .6. Of the experimental studies of the deposition of thin films, only a few have been analyzed in terms of both scaling laws of Eq. (1) [8]. For these studies 1~ct~0.2 and 0.56~P~0.22 [9]. The values of a overlap our own" but our values of P are si...

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“…The system and the plasma coating process have been previously described [16,17]. Briefly, the system consists of a supply manifold with controlled gas flow rates, an rf discharge generator, a coating chamber, and a vacuum pump.…”

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Surface Roughness Scaling of Plasma Polymer Films

et al. 1994

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“…The approach we used to fabricate the bump was to align a precision aperture to the capsule and coat through the aperture onto the capsule surface using plasma polymer coating technology (3). Previous work used a similar approach to fabricate micro-spot flat targets with various dopants for plasma temperature and stability measurements (4). The bumps were characterized using optical microscopy, white light interference microscopy (WYKO, Veeco), and AFM sphere mapping (5).…”

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Fabrication of Surface Bumps on a Capsule to Simulate Fill Tube Mass Defects

Letts

Fearon

Buckley

et al. 2006

Fusion Science and Technology

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Precision single bumps were deposited on the surface of ICF capsules to simulate the hydrodynamic instability caused by a fill tube. The bump is fabricated by placing an aperture mask on the capsule and coating plasma polymer through the aperture. The apparatus and procedures used to align and hold the shell for coating will be described. Bumps were made having a width of about 50 µm and from 1 to 10 µm in height. The bumps were characterized using interference microscopy and AFM.

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Feasibility of Organo-Beryllium Target Mandrels Using Organo-Germanium PECVD as a Surrogate

1995

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nor any of their employees, makes any warranty, express or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, recommendation, or favoring by the United States Government or the University of California. The views and opinions of authors expressed herein d o not necessarily state or reflect those of the United States Government or the University of California, and shall not be used for advertising or product endorsement purposes. DISCLAIMER Portions of this document may be illegible in electronic image products. Images are produced from the best available original document.

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Summary Abstract: Microspot target development with seeded and patterned plasma polymers

Cited by 3 publications

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Surface Roughness Scaling of Plasma Polymer Films

Surface Roughness Scaling of Plasma Polymer Films

Fabrication of Surface Bumps on a Capsule to Simulate Fill Tube Mass Defects

Feasibility of Organo-Beryllium Target Mandrels Using Organo-Germanium PECVD as a Surrogate

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