Summary: key trends in optical switches

Li, B.J.

doi:10.1533/9780857090416.313

Cited by 1 publication

(1 citation statement)

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“…An important advantage of a-SiC is the possibility to incorporate nitrogen as has been previously demonstrated that could lead to conductive films and optical elements where the devices can be tuned directly with electrical contacts, therefore allowing configurations for, e.g., optical switches or adding tunability to multimode interferometers (MMIs) …”

Section: Introductionmentioning

confidence: 99%

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Lopez-Rodriguez,

van der Kolk,

Aggarwal

et al. 2023

ACS Photonics

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Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second-and third-order nonlinearities, and broad transparency window in the visible and near-infrared range. However, integrating silicon carbide (SiC) has been difficult, and current approaches rely on transfer bonding techniques that are timeconsuming, expensive, and lacking precision in layer thickness. Here, we demonstrate high-index amorphous silicon carbide (a-SiC) films deposited at 150 °C and verify the high performance of the platform by fabricating standard photonic waveguides and ring resonators. The intrinsic quality factors of single-mode ring resonators were in the range of Q int = (4.7−5.7) × 10 5 corresponding to optical losses between 0.78 and 1.06 dB/cm. We then demonstrate the potential of this platform for future heterogeneous integration with ultralow-loss thin SiN and LiNbO 3 platforms.

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Section: Introductionmentioning

confidence: 99%