Summary of meetings

Boulos, M.; Fauchais, Pierre

doi:10.1007/bf00566861

Cited by 2 publications

(3 citation statements)

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“…p (1) ij , (A. 23) where T h,e represents T e if the species i or j is the electron, otherwise T h .…”

Section: Appendix a Transport Propertiesmentioning

confidence: 99%

“…An inductively coupled RF plasma torch has many specific characteristics, compared with other thermal plasma torches, making it a preferred source in many industrial material processing applications, such as the deposition of metals, ceramics and metal-matrix composites, the synthesis of new materials, preparation of nanopowders and plasma coating [1][2][3][4]. The ICP torch can be quite easily modified to a supersonic configuration [5], by adding a nozzle after the induction zone.…”

Section: Introductionmentioning

confidence: 99%

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Two-temperature chemically non-equilibrium modelling of anairsupersonic ICP

Morsli¹,

Proulx²

2007

J. Phys. D: Appl. Phys.

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In this work, a non-equilibrium mathematical model for an air inductively coupled plasma torch with a supersonic nozzle is developed without making thermal and chemical equilibrium assumptions. Reaction rate equations are written, and two coupled energy equations are used, one for the calculation of the translational–rotational temperature Thr and one for the calculation of the electro-vibrational temperature Tev. The viscous dissipation is taken into account in the translational–rotational energy equation.The electro-vibrational energy equation also includes the pressure work of the electrons, the Ohmic heating power and the exchange due to elastic collision.Higher order approximations of the Chapman–Enskog method are used to obtain better accuracy for transport properties, taking advantage of the most recent sets of collisions integrals available in the literature. The results obtained are compared with those obtained using a chemical equilibrium model and a one-temperature chemical non-equilibrium model. The influence of the power and the pressure chamber on the chemical and thermal non-equilibrium is investigated.

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“…p (1) ij , (A. 23) where T h,e represents T e if the species i or j is the electron, otherwise T h .…”

Section: Appendix a Transport Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Two-temperature chemically non-equilibrium modelling of anairsupersonic ICP

Morsli¹,

Proulx²

2007

J. Phys. D: Appl. Phys.

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show abstract

“…An inductively coupled radio frequency (RF) plasma torch with a supersonic nozzle is characterized by very high temperature, velocity and pressure gradients, making it a preferred source in many industrial materials processing applications, such as deposition of metals, ceramics and metal-matrix composites, synthesis of new materials, preparation of nanopowders and plasma coating [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

Chemical non-equilibrium modelling of an argon–oxygen supersonic ICP

Morsli¹,

Proulx²,

Gravelle³

2011

Plasma Sources Sci. Technol.

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In this paper, a non-equilibrium mathematical model for an argon-oxygen inductively coupled plasma (ICP) torch with a supersonic nozzle is developed without making chemical equilibrium assumptions. Reaction rates of dissociation and recombination of diatomic gas and ionization are taken into account. Higher-order approximations of the Chapman-Enskog method are used to obtain better accuracy for transport properties, taking advantage of the most recent sets of collision integrals available in the literature.In order to validate the developed model, results are compared qualitatively and quantitatively with existing experimental data. The calculated results for the axial temperature profile for pure argon less than 10 mm above the substrate are in good agreement with spectroscopic measurements.

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Summary of meetings

Cited by 2 publications

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Two-temperature chemically non-equilibrium modelling of anairsupersonic ICP

Two-temperature chemically non-equilibrium modelling of anairsupersonic ICP

Chemical non-equilibrium modelling of an argon–oxygen supersonic ICP

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