Optical and EUV Nanolithography XXXVII 2024
DOI: 10.1117/12.3010784
|View full text |Cite
|
Sign up to set email alerts
|

Super-polished metallic freeform optics for EUV-application

Tatjana Porwol,
Jan Kinast,
Luxuan Cai
et al.

Abstract: Super-polished optics are crucial components for extremely short wavelength applications. One of the main applications are illumination optics. Short operational wavelengths of ~13,5 nm lead to high demands on substrate's surface quality, especially for microroughness features in the high spatial frequency range (HSFR). The excellent surface quality is essential for high-performant reflective mirrors.Typically, mirror substrates for EUV applications are made of glass, glass-ceramics and silicon. This paper des… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 13 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?