Super-polished metallic freeform optics for EUV-application
Tatjana Porwol,
Jan Kinast,
Luxuan Cai
et al.
Abstract:Super-polished optics are crucial components for extremely short wavelength applications. One of the main applications are illumination optics. Short operational wavelengths of ~13,5 nm lead to high demands on substrate's surface quality, especially for microroughness features in the high spatial frequency range (HSFR). The excellent surface quality is essential for high-performant reflective mirrors.Typically, mirror substrates for EUV applications are made of glass, glass-ceramics and silicon. This paper des… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.