Super-resolution x-ray imaging using interaction between periodic structure of object and standing wave generated with total-reflection-mirror interferometer

Abstract

View the article online for updates and enhancements. Super-resolution x-ray imaging using interaction between periodic structure of object and standing wave generated with total-reflection-mirror interferometer Abstract. A super-resolution method in projection-type x-ray imaging is proposed. In this method, interference fringes generated with a two-beam interferometer are used for detecting the fine periodic structure of the object.When the sample has a fine periodic structure, the structure can be detected as interaction between the periodic structure of object and the standing wave formed by the two-beam interferometer. Feasibility studies have been carried out using wavefront-division interferometer with total-reflection-mirror optics and a resolution test chart as a model sample. The fine structures with a period up to 100 nm were detected as modulation of transmitting x-ray intensity at 11.5 keV.