Super-twisting Sliding Mode Control Based on Electrostatic MEMS Micromirror Scanning

Abstract

In this paper, a Super-twisting sliding-mode control method based on a nonlinear interference observer is proposed for the external perturbation of MEMS micromirrors during beam scanning. Developing a physical model of electrostatic MEMS micromirror, the Super-twisting sliding-mode control algorithm based on nonlinear interference observer is applied to the electrostatically driven MEMS scanning micromirror with side electrodes, with the demonstration on stability of the control system by Lyapunov theory. The method effectively improves the anti-disturbance performance of the system. The simulation results show that the Super-twisting sliding mode control method based on nonlinear disturbance observer can effectively enhance the disturbance inhibition of the system.