2017
DOI: 10.1063/1.5016190
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Superconducting micro-resonator arrays with ideal frequency spacing

Abstract: We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this techni… Show more

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Cited by 43 publications
(31 citation statements)
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“…500 MHz of instantaneous bandwidth could readout 100 detectors with a conservative spacing of 5 MHz between adjacent detectors. We are optimistic that the multiplexing factor will only improve given recent advances in kinetic inductance detector fabrication [21].…”
Section: Discussionmentioning
confidence: 99%
“…500 MHz of instantaneous bandwidth could readout 100 detectors with a conservative spacing of 5 MHz between adjacent detectors. We are optimistic that the multiplexing factor will only improve given recent advances in kinetic inductance detector fabrication [21].…”
Section: Discussionmentioning
confidence: 99%
“…49 Further improvements have been demonstrated using post-fabrication resonator trimming methods. 86,87 3. Pitch: The baseline GEP-I pixel pitch is 300 µm from wavelengths of 10 µm to 60 µm to provide 3.43 pixel sizes (the pitch is larger for λ > 60 µm).…”
Section: Multiplexingmentioning
confidence: 99%
“…We have now produced an array of over 2000 resonators on a 150 mm substrate in order to characterize device uniformity over these large scales. For the deployed arrays, we aim to implement a recently developed LED mapper and post-measurement lithographic capacitor correction technique in order to achieve highly uniform frequency spacing between resonators and detector+readout yield near 100% (see [11]).…”
Section: Ongoing Developmentmentioning
confidence: 99%