The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/ Al 2 O 3 /Al tunnel junctions using a double angle evaporation method based on a suspended shadow mask. The Al 2 O 3 junction barrier has been formed by introducing pure oxygen into the chamber during the fabrication process. We have adjusted exposure conditions by changing either the oxygen pressure or the oxidizing time during the formation of tunnel barriers to control the critical current density J c and the junction specific resistance R c . [8][9][10][11][12]. Quantum computation entails a new computation system that exceeds its classical counterpart. It is anticipated there will be an exponential speed up in solving problems which are difficult for classical computers, such as prime factorization. This prospect has fuelled much research into various experimental realizations of a quantum computer. Superconducting quantum computation is a viable and scalable approach to achieving a quantum computation scheme. Because of their solid state nature, their macroscopic phase coherence and their similarity to conventional semiconductor circuits, Josephson junction circuits are a promising technology within superconducting quantum computation schemes [13][14][15][16]. A typical flux qubit [16][17][18][19] consists of an isolated superconductive junction and a SQUID. In a SQUID the tunnel junctions are arranged in parallel to form a superconducting loop. The superconductive Josephson junction is the key device for superconducting quantum computation. The most commonly used materials for Josephson junction qubits are Aluminum (Al) and Niobium (Nb), because of the purity of their superconducting state as well as their relatively low transition temperatures (T c = 1.2 K and 9.3 K, respectively) [20]. We have chosen to work with aluminum for several reasons. Firstly, high quality aluminum oxide has been shown to be less detrimental to Josephson junction qubits than other materials [21], with longer coherence times seen in aluminum-based devices [22]. Also, the fabrication of Al is flexible because of the fact that its melting point (660°C) is significantly lower than that of other popular superconducting materials, such as Nb (2477°C). For qubit applications, we have explored the electronic properties of the Al/Al 2 O 3 /Al tunnel junction, including the critical current density J c and the junction specific resistance R c , which depend on the oxygen pressure and the oxidation