Supercritical Fluid Chemical Deposition as an Alternative Process to CVD for the Surface Modification of Materials

Majimel, Mélanie; Marre, Samuel; Garrido, Elsa; Aymonier, Cyril

doi:10.1002/cvde.201106921

Cited by 33 publications

(18 citation statements)

References 72 publications

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“…Supercritical fluid chemical deposition (SFCD) process mainly developed with supercritical carbon dioxide (scCO2) can also be an alternative method that enables the fabrication of nanostructured films in an environmentally friendly manner and from a scalable technology [10][11][12][13][14]. SCFD technique is a one-pot, multi-step process that involves, the dissolution of a metallic precursor in a supercritical fluid followed by a chemical reaction (i.e.…”

Section: Introductionmentioning

confidence: 99%

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

et al. 2017

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:A comparison of crystallinity, microstructure, surface morphology and electrical conductivity is proposed for the deposition of copper films, using supercritical fluid chemical deposition (SFCD) and RF magnetron sputtering techniques. Both preparation methods yield nanocrystalline Cu films (< 100 nm) but SFCD gives access to a higher crystallinity for the same AlN substrate temperature during the deposit. Based on the film characteristics, a comparison of the evolution of electrical properties is done for RF magnetron sputtered copper films and SFCD ones with H2 as reducing agent. Uniform strain values are significantly reduced when SFCD technique is used and crystallinity is highly increased leading to lower resistivity values for a same crystallite size. This study demonstrates the viability of the SFCD technique to produce high quality nanostructured copper thin films with low resistivity values.

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Section: Introductionmentioning

confidence: 99%

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

et al. 2017

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“…Massive efforts have been made and readers interested in the advancements in the field may find comprehensive reviews and selected examples. 61,[81][82][83][84][199][200][201][202][203][204][205][206][207][208][209][210][211][212][213][214] Supercritical CO2 can enhance the solubility of H2 in toluene 215 to create a homogeneous reductive environment favourable for the reductive synthesis of metal NPs. 51,87 As an example, Pd NPs (2-4 nm) were prepared in toluene flows by hydrogen reduction of Pd(ii) bis(hexafluoroacetylacetonate) and their surfaces were in situ bonded to different functional ligands solubilized in toluene and introduced during the synthesis.…”

Section: Carbon Dioxidementioning

confidence: 99%

Chemistry in supercritical fluids for the synthesis of metal nanomaterials

Musumeci

Aymonier

2019

React. Chem. Eng.

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“…Chemical Deposition (SFCD) [53,54]. This deposition method allows decorating the surface of a particle from supported nanoparticles to layered architecture ( Figure 3a).…”

Section: Surface Functionalization Of Ferroelectric Particles By Supementioning

confidence: 99%

Specific core-shell approaches and related properties in nanostructured ferroelectric ceramics

et al. 2018

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Interfaces are a major issue when designing ferroelectric nanostructured materials with tailored properties. In a context of integration and multifunctionality in the field of electronics, several strategies have been developed to control the microstructure and defect chemistry of interfaces that strongly impact the macroscopic properties. The suitability of the core-shell approaches that allow a subtle tuning of interface phenomena at different scales has been widely demonstrated. We focus here on the flexibility of the core-shell approach devoted to the processing of nanostructured ferroelectric composites. Our strategy relies on the use of advanced synthesis processes to design ferroelectric grains coated with shells of different nature, morphology and crystallinity. Typical examples will be reviewed with a specific attention on their impact on both microstructure and dielectric properties. Our approach, based also on the use of fast sintering technique, provides a guidance to design 3D bulk nanostructured ferroelectrics while controlling and/or exploiting size, interface and defects chemistry. The contribution of specific spectroscopies to probe interfacial chemistry and defects is underlined. The high density of interfaces in core-shell materials is obviously an advantage to target additional functionality such as magneto-electric coupling. This is illustrated in 3D composites and one dimensional nanostructures that coaxially combine electric and magnetic materials. The core-shell approach described here could be transferred to a much broader range of materials covering many functionalities provided a deeper understanding of the interfaces at the atomic scale is achieved and a further development of low temperature processing is reached.

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Supercritical Fluid Chemical Deposition as an Alternative Process to CVD for the Surface Modification of Materials

Cited by 33 publications

References 72 publications

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

Chemistry in supercritical fluids for the synthesis of metal nanomaterials

Specific core-shell approaches and related properties in nanostructured ferroelectric ceramics

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