Superhard nanocomposite Ti–Al–Si–N films deposited by reactive unbalanced magnetron sputtering

Jiang, Ning; Shen, Y.G.; Zhang, H.J.; Bao, Sheng; Hou, Xiaoyuan

doi:10.1016/j.mseb.2006.06.043

Cited by 90 publications

(26 citation statements)

References 37 publications

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“…Numerous hardening mechanisms have been proposed in the literature. These studies explain the role of metal/nonmetal elements doping in films, which improves film hardness from the viewpoints of solid solution strengthening, precipitate hardening, grain boundary hardening, stress-field hardening, nanocomposite hardening, and so on [10,43,44].…”

Section: Mechanical and Tribological Performancesmentioning

confidence: 99%

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and Si contents in the coatings were obtained by changing the power of Al-Si target from 0 to 1 kW. The results demonstrated a face-centered cubic structure in all of the coatings. With increasing Al-Si target power, both the density and mean diameter of the macroparticles on the coating surface declined. As Al and Si contents increased, the microstructure of the Cr-Al-Si-N coatings evolved from a dense column structure, to a finer grain column structure, and then to a compact granular-like structure. The hardness of the coatings increased from 21.5 GPa for the pure CrN coating, to a maximum value of~27 GPa for the Cr-Al-Si-N coating deposited at 0.4 kW, which was mainly attributed to the solid solution strengthening and increased residual stress. The addition of Al and Si contents led to enhanced wear resistance against alumina balls at both room and elevated temperatures. Meanwhile, the Cr-Al-Si-N coatings also exhibited an excellent resistance to high-temperature oxidation at 800 and 1000 • C, and improved corrosion resistance, as compared with CrN coatings.

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Section: Mechanical and Tribological Performancesmentioning

confidence: 99%

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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“…3 applications as wear-resistant coatings on, for example, cutting tools and automotive components, typically consist of transition-metal nitride [11,12,13,14,15,16,17,18,19], carbide [20,21,22,23,24,25], or boride [26,27,28,29,30] nanocrystals encapsulated by a few ML of a covalent interfacial layer (e.g., Si 3 N 4 , SiC, BN, CN x , or C).…”

Section: Accepted M Manuscriptmentioning

confidence: 99%

Si incorporation in Ti1−xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns

Eriksson

Tengstrand

et al. 2014

Surface and Coatings Technology

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“…The addition of silicon, which have partially solubility, will improve mechanical properties. It should be noted, that the binary nitrides like, TiN, CrN, ZrN, NbN and VN have FCC structure, whereas AlN, Si 3 N 4 and BN: hexagonal or amorphous [30][31][32][33][34][35][36][37]. The formation of simple structure indicates that the non-FCC binary nitrides are dissolves into FCC nitrides.…”

Section: Introductionmentioning

confidence: 99%

The effects of Cr and Si additions and deposition conditions on the structure and properties of the (Zr-Ti-Nb)N coatings

Pogrebnjak

Bagdasaryan

Береснев

et al. 2017

Ceramics International

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A B S T R A C TIn this study, (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N and (Zr-Ti-Cr-Nb-Si)N nitride coatings were obtained using a welldeveloped vacuum arc deposition. The systematical investigations demonstrate that the chemical composition, microstructure, and properties of the coatings intimately rely on the deposition parameters (pressure of working gas and substrate bias). Effects of Cr and Si additions on microstructure and mechanical properties of the (ZrTi-Nb)N coatings have been investigated using scanning electron microscopy (SEM) equipped with energy dispersive spectrum (EDS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscope (TEM), hardness measurements and adhesion testing. First-principles band-structure calculations and Gibbs-Rosenbaum triangle representation have been used to investigate the elemental and phase compositions in nitride coatings. The multi-component (Zr-Ti-Cr-Nb-Si)N and (Zr-Ti-Nb)N coatings are found to be a simple face-centered cubic (FCC) solid solution. For the coatings without Si, the structure is mainly composed of TiN fcc phase and Cr 2 N trigonal modification. The hardness values were in the ranges (24-42 GPa). The (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N coatings provided the best adhesive strength in different conditions. The (Zr-Ti-Cr-Nb-Si)N coatings exhibited the worst adhesive strength, which may be attributed to the relative low hardness.

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Superhard nanocomposite Ti–Al–Si–N films deposited by reactive unbalanced magnetron sputtering

Cited by 90 publications

References 37 publications

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

Si incorporation in Ti1−xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns

The effects of Cr and Si additions and deposition conditions on the structure and properties of the (Zr-Ti-Nb)N coatings

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