2002
DOI: 10.1063/1.1509471
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Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates

Abstract: We demonstrate the operation of surface-acoustic-wave (SAW) transducers fabricated on AlN/SiC structures at frequencies as high as 19 GHz. The high SAW velocity of the AlN film is enhanced by the even higher sound velocity of the SiC substrate, enabling us to achieve these frequencies with a SAW wavelength of 400 nm.

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Cited by 84 publications
(44 citation statements)
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“…Extension of these techniques to group III-Nitride systems is important, as their large gap enables high-power/high-temperature applications and high repetition rate SPSs covering a broad spectral range. Also, the high sound velocities and the stronger electromechanical coupling coefficients of nitrides, as compared to (Al,Ga)As materials, 16 would allow for high frequency applications using all-nitride devices. While experiments on modulation of the electronic properties of GaN films 17 as well as transport of charge carriers in GaN nanowires 5 by SAWs have been reported, studies on acoustically driven modulation of the optical emission of nitride-based QDs have not yet been demonstrated.…”
mentioning
confidence: 99%
“…Extension of these techniques to group III-Nitride systems is important, as their large gap enables high-power/high-temperature applications and high repetition rate SPSs covering a broad spectral range. Also, the high sound velocities and the stronger electromechanical coupling coefficients of nitrides, as compared to (Al,Ga)As materials, 16 would allow for high frequency applications using all-nitride devices. While experiments on modulation of the electronic properties of GaN films 17 as well as transport of charge carriers in GaN nanowires 5 by SAWs have been reported, studies on acoustically driven modulation of the optical emission of nitride-based QDs have not yet been demonstrated.…”
mentioning
confidence: 99%
“…AlN is one of the most suitable materials for high-frequency filters, duplexers, and resonators because of its high SAW velocity and its insulating nature. 2,3 On the other hand, GaN-based SAW delay-line oscillators have shown their potential as visible-blind remote UV sensors. 4 Given that the bandgap of In x Ga 1-x N can be tuned from 0.64 eV (x ¼ 1) to 3.4 eV (x ¼ 0) 5 and that the alloy exhibits a higher electromechanical coupling than GaN, InGaN-based SAW devices are good candidates for sensitive visible light sensors.…”
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confidence: 99%
“…The operation frequency of a SAW device is closely related to the spacing of the interdigital transducer (IDT) that is significantly limited by the photolithograph capability (Springer et al, 1999). Thus one way to achieve higher passing frequencies is to use crystals with a higher speed of sound, such as sapphire (Caliendo, 2003), SiC (Takagaki, 2002) or diamond (Yamanouchi et al, 1989) (Nakahata et al, 1992).…”
Section: Saw Filtersmentioning
confidence: 99%