Supplementary material from "Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects"

Zhang, Libin; Yan, Han; Zhu, Guo; Liu, Sheng; Gan, Zhiyin

doi:10.6084/m9.figshare.c.4183352.v1

2018

DOI: 10.6084/m9.figshare.c.4183352.v1

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Supplementary material from "Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects"

Libin Zhang¹,

Han Yan²,

Guo Zhu³

et al.

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Supplementary material from "Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects"

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