The prominence of cyber security continues to increase on a daily basis. Following the cyber attacks in recent years, governments have implemented a range of regulations. The advancement of technology and digitalization has led to the creation of new vulnerabilities that cyber attackers can exploit. The digitalization of facilities such as energy distribution networks and water infrastructures has enhanced their efficiency, thereby benefiting states and society. The modern sensors, controllers, and networks of these new generation facilities have made them susceptible to cyber attackers. While all forms of cyber attacks are detrimental, targeting critical cyber-physical systems presents a heightened level of peril. These assaults have the potential to disrupt the social structure and pose a threat to human lives. Various techniques are employed to guarantee the security of these facilities, which is of utmost importance. This study examined the applications of machine learning and deep learning methods, which are sub-branches of artificial intelligence that have recently undergone a period of significant advancement. Intrusion detection systems are being created for the networks that facilitate communication among the hardware components of the cyber-physical system. Another potential application area involves the development of models capable of detecting anomalies and attacks in the data generated by sensors and controllers. Cyber physical systems exhibit a wide range of diversity. Due to the wide range of variations, it is necessary to utilize specific datasets for training the model. Generating a dataset through attacks on a functional cyber-physical system is unattainable. The study also analyzed the solutions to this problem. Based on the analyzed studies, it has been observed that the utilization of artificial intelligence enhances the security of cyber physical systems.
