Suppression of dewetting phenomena during excimer laser melting of thin metal films on SiO2

Kline, J. E.; Leonard, John P.

doi:10.1016/j.tsf.2005.04.037

Cited by 15 publications

(15 citation statements)

References 40 publications

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“…At ˚ ≥ 240 mJ/cm 2 (N = 1), the surface tension in the laserinduced metal liquid phase leads to an initiated dewetting of the metal from the dielectric surface and, finally, to the formation of hole structures. Similar effects were also found on other metal layers [47].…”

Section: Experimental and Theoretical Resultssupporting

confidence: 80%

“…This approach was already discussed for Si/SiO 2 systems [46]. Furthermore, similar hemispheric structures were also found on irradiated gold layers on SiO 2 [47]. At ˚ ≥ 240 mJ/cm 2 (N = 1), the surface tension in the laserinduced metal liquid phase leads to an initiated dewetting of the metal from the dielectric surface and, finally, to the formation of hole structures.…”

Section: Experimental and Theoretical Resultssupporting

confidence: 63%

“…The surface tension results in the formation of well-defined hole structures with a very smooth border [26,47]. This result can be found by the single-pulse irradiation (see Fig.…”

Section: Experimental and Theoretical Resultsmentioning

confidence: 70%

“…Therefore, a constant reflectivity of 0.6 was assumed. Furthermore, the energy loss induced by the phase transition is observed in the model [47].…”

Section: Theorymentioning

confidence: 95%

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Nanodrilling of fused silica using nanosecond laser radiation

Lorenz

Zajadacz

Bayer

et al. 2015

Applied Surface Science

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Section: Experimental and Theoretical Resultssupporting

confidence: 80%

Section: Experimental and Theoretical Resultssupporting

confidence: 63%

“…The surface tension results in the formation of well-defined hole structures with a very smooth border [26,47]. This result can be found by the single-pulse irradiation (see Fig.…”

Section: Experimental and Theoretical Resultsmentioning

confidence: 70%

“…Therefore, a constant reflectivity of 0.6 was assumed. Furthermore, the energy loss induced by the phase transition is observed in the model [47].…”

Section: Theorymentioning

confidence: 95%

See 2 more Smart Citations

Nanodrilling of fused silica using nanosecond laser radiation

Lorenz

Zajadacz

Bayer

et al. 2015

Applied Surface Science

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“…This was followed by RF magnetron sputter deposition of a 580 nm SiO 2 capping layer in the same chamber. Additional details concerning the sample configuration and preparation are given elsewhere [14]. X-ray diffraction and SEM analysis were used to confirm that the copper films were continuous and uniformly polycrystalline.…”

Section: Methodsmentioning

confidence: 99%

Four-zone solidification microstructure formed by laser melting of copper thin films

Zhong

Kulovits

Wiezorek

et al. 2009

Applied Surface Science

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Ag Thin Film Dewetting Prevention by Ion Implantation

Chi

Bassim

2019

Adv Materials Inter

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antidewetting upon SiO 2 /Si substrate by Al doping, yet neither of them provided a theoretical explanation to detail the mechanism. [26][27][28] Despite the contribu tion that the aforementioned approach made to increase thin film stability, novel strategies for film dewetting prevention are very much an open research ques tion. Here we introduce a novel antidewet ting strategy through ion implantation. Si and In atoms are implanted into Ag thin film to alter its wettability during thermal annealing. Si is primarily researched here because Ag-Si interdiffusion plays a crit ical role in modern Si-Ag based electro nics industry and a systematic research on Sidoped Ag thin films may provide essen tial reference for its further development. In has achieved antidewetting purpose according to Gu el al. thus is used here as additional support to our antidewet ting strategy. [27,28] Other elements such as Al, Cu, Pt that succeeded in Ag thin film dewetting prevention and Na that failed in this purpose are not discussed here due to the limited content. [26][27][28][29][30][31][32] Sapphire is widely used as substrate for epitaxial growth of IIInitride, LEDs, and microelectronic applications due to its wide optical bandgap, superior chemical and mechanical robustness. Thus, it is selected as the substrate in our research. Furthermore studying on Ag nanostructure upon sapphire could be helpful to develop novel optical or plasmonic applications. [14,[33][34][35][36] It is found that a doping dose of 10 14 cm −2 Si or In atoms are sufficient to prevent Ag film from fracture at 530 °C. A novel grain growth model is established here and, combined with our thermodynamic simulation, shows that the Ag dewetting is pre vented due to the substantially decreased film grain size attrib uted to the dopantinduced solute drag.100 nm Ag films are prepared by sputtering (Torr Inter national, Inc.) at room temperature and at a base pressure of ≈5 × 10 −6 Torr on polished single crystal sapphire substrates. Figure 1a,b shows the optical microscopy images of a) as deposited Ag film and b) Sidoped Ag film before (top) and after (bottom) annealing, respectively. No evident distinctions can be observed from either sample before heat treatment, there is simply the high reflectivity image, which is generally feature less in optical microscopy. However, upon annealing at 530 °C for 30 min in an at a vacuum of 10 −5 Torr, which is a common temperature window in the semiconductor industry, the non doped Ag film appears to have obvious microscale islanding and exposes the sapphire subsurface while the Sidoped sample remains intact. Atomic force microscopy (AFM) images with higher magnification are shown in Figure 1c-e which Ion implantation is applied here to prevent metallic silver (Ag) thin films from dewetting on a sapphire substrate during annealing. In these experiments, silicon (Si) and indium (In) atoms are implanted into Ag thin films grown directly on sapphire, which are then annealed for different time periods to introduce film dewetting. I...

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Suppression of dewetting phenomena during excimer laser melting of thin metal films on SiO2

Cited by 15 publications

References 40 publications

Nanodrilling of fused silica using nanosecond laser radiation

Nanodrilling of fused silica using nanosecond laser radiation

Four-zone solidification microstructure formed by laser melting of copper thin films

Ag Thin Film Dewetting Prevention by Ion Implantation

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