2020
DOI: 10.1016/j.mfglet.2020.07.004
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Suppression of grain boundary steps in chemical mechanical polishing of W-Ni-Fe alloy by a citric acid-based slurry

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Cited by 6 publications
(4 citation statements)
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“…Acid slurries, instead, have been shown to reduce roughness while polishing tungsten alloy. For example, citric acid-based slurry balances mechanical and chemical processes and prevents grain boundary steps from developing, thus offering a superior surface finish [ 76 ]. Li et al [ 74 ] used acid colloidal silica to obtain sub-nanometer roughness for YAG crystal, showing that the acidic slurry facilitates chemical reactions and the elimination of surface scratches or damages.…”
Section: Chemical Modification Polishing Approachesmentioning
confidence: 99%
“…Acid slurries, instead, have been shown to reduce roughness while polishing tungsten alloy. For example, citric acid-based slurry balances mechanical and chemical processes and prevents grain boundary steps from developing, thus offering a superior surface finish [ 76 ]. Li et al [ 74 ] used acid colloidal silica to obtain sub-nanometer roughness for YAG crystal, showing that the acidic slurry facilitates chemical reactions and the elimination of surface scratches or damages.…”
Section: Chemical Modification Polishing Approachesmentioning
confidence: 99%
“…Currently, research on WHA machining is limited and mainly focuses on areas such as the ultrasonic elliptical vibration cutting and leveraging of single-crystal diamond tools [ 8 , 9 , 10 ], tool wear mechanisms [ 11 , 12 , 13 , 14 ], and chemical–mechanical polishing [ 15 , 16 ]. Yin et al [ 8 ] proposed a design for a single-excitation-based ultrasonic elliptical vibration cutting device.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is widely used in civil and military industries [ 1 ]. At present, tungsten alloy machining methods mainly include cutting [ 2 ], grinding and polishing [ 3 ]. In the traditional cutting process, due to the large differences between the characteristics of biphase materials in tungsten alloy, the workpiece appears with scaly spines and furrows, and a series of problems such as tool wear, poor machining integrity and chip adhesion occur, which makes it difficult to obtain the high surface quality of tungsten alloy, and limits the application of tungsten alloy [ 4 ].…”
Section: Introductionmentioning
confidence: 99%
“…In the meantime, the ultrasonic grinding process could not only reduce the grinding force and grinding temperature, but also reduce the wear area of diamond. Shi et al [ 3 ] carried out an experimental study on the grinding and polishing of tungsten alloy and silicon carbide sandpaper, with a particle size of 38 μm, 25 μm, 18 μm and 15 μm, and a diamond consolidation abrasive grinding pad with a particle size of 8 μm was used for grinding. It was found that the particle size was smaller and the ground surface was smoother; meanwhile, it was demonstrated that the height difference between the tungsten phase and the bonding phase was obvious on the surface of the polished tungsten alloy when using a silica sol polishing solution with an average particle size of 72 nm, in which the tungsten was higher and the bond was lower.…”
Section: Introductionmentioning
confidence: 99%