Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Dissanayake, Don W; Al-Sarawi, Said F.; Abbott, Derek

doi:10.5772/9713

Acoustic Waves 2010

DOI: 10.5772/9713

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Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Don W Dissanayake¹,

Said F. Al-Sarawi²,

Derek Abbott³

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Cited by 2 publications

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“…As a branch of microfluidics, the acoustofluidics field primarily relies on piezoelectricity as the source of mechanical waves [7][8][9] . A commonly employed piezoelectric material for acoustofluidic applications is LiNbO 3 ceramic, which comes in various types based on rotations and cuts 10 . Among these, the Y-rotated X-propagating 128°-LiNbO 3 is the best suited for surface acoustic waves (SAW) generation and propagation due to its high electromechanical coupling coefficient and high electric potential strength 9 .…”

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confidence: 99%

A surface treatment method for improving the attachment of PDMS: acoustofluidics as a case study

Al-Ali,

Waheed,

Dawaymeh

et al. 2023

Sci Rep

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A method for a permanent surface modification of polydimethylsiloxane (PDMS) is presented. A case study on the attachment of PDMS and the lithium niobate (LiNbO3) wafer for acoustofluidics applications is presented as well. The method includes a protocol for chemically treating the surface of PDMS to strengthen its bond with the LiNbO3 surface. The PDMS surface is modified using the 3-(trimethoxysilyl) propyl methacrylate (TMSPMA) silane reagent. The effect of silane treatment on the hydrophilicity, morphology, adhesion strength to LiNbO3, and surface energy of PDMS is investigated. The results demonstrated that the silane treatment permanently increases the hydrophilicity of PDMS and significantly alters its morphology. The bonding strength between PDMS and LiNbO3increased with the duration of the silane treatment, reaching a maximum of approximately 500 kPa. To illustrate the effectiveness of this method, an acoustofluidic device was tested, and the device demonstrated very promising enhanced bonding and sealing capabilities with particle manipulation at a flow rate of up to 1 L/h by means of traveling surface acoustic waves (TSAW). The device was reused multiple times with no fluid leakage or detachment issues. The utility of the presented PDMS surface modification method is not limited to acoustofluidics applications; it has the potential to be further investigated for applications in various scientific fields in the future.

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mentioning

confidence: 99%

A surface treatment method for improving the attachment of PDMS: acoustofluidics as a case study

Al-Ali,

Waheed,

Dawaymeh

et al. 2023

Sci Rep

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DeepAUP: A Deep Neural Network Framework for Abnormal Underground Heat Transport Pipelines

Lee

Ji²,

Park

2024

IEEE Trans. Automat. Sci. Eng.

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Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Cited by 2 publications

References 23 publications

A surface treatment method for improving the attachment of PDMS: acoustofluidics as a case study

A surface treatment method for improving the attachment of PDMS: acoustofluidics as a case study

DeepAUP: A Deep Neural Network Framework for Abnormal Underground Heat Transport Pipelines

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