Surface acoustic wave microsensors using diffused substrates

Abstract

Various YZ-LiNbO, substrate configurations have been investigated to develop efficient ways of confining the wave energy in surface acoustic wave (SAW) microsensors based on waveguide structure. The core and cladding regions for the SAW waveguide sensors have been titanium in-diffused or out-diffused and in some cases metal overlays have been used. By varying the diffusion conditions, the SAW velocities in these regions can be controlled such that a channeled region with interface wave reflection is produced while minimizing the wave velocity difference between the cladding and the core.

Amperometric microsensor for water

“…One particularly interesting approach utilized perfluorosulfonate ionomer (PFSI) immobilized Rhodamine 6G; an increase in fluorescence intensity and decrease in fluorescence lifetime are observed with increasing humidity (32). Surface acoustic wave moisture sensors, regarded as holding much promise (33), are also in the experimental stage.…”