2020 IEEE International Ultrasonics Symposium (IUS) 2020
DOI: 10.1109/ius46767.2020.9251505
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Surface Acoustic Wave Sensors for Temperature and Strain Measurements

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Cited by 5 publications
(2 citation statements)
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“…During the simulation, when a temperature field is applied, LiNbO 3 material will undergo thermal change and related physical properties will change. To be specific, the elastic constant, the piezoelectric constant, the dielectric constant and thermal expansion coefficient will be affected by the temperature [21]. The resonant frequency of LiNbO 3 shows a linear variation with the temperature and the quadratic dependence is very small; hence, in the simulation, only the first-order temperature coefficients of the elastic, piezoelectric and dielectric constants are considered.…”
Section: Calculation Principlementioning
confidence: 99%
“…During the simulation, when a temperature field is applied, LiNbO 3 material will undergo thermal change and related physical properties will change. To be specific, the elastic constant, the piezoelectric constant, the dielectric constant and thermal expansion coefficient will be affected by the temperature [21]. The resonant frequency of LiNbO 3 shows a linear variation with the temperature and the quadratic dependence is very small; hence, in the simulation, only the first-order temperature coefficients of the elastic, piezoelectric and dielectric constants are considered.…”
Section: Calculation Principlementioning
confidence: 99%
“…Therefore, by monitoring acoustic wave characteristics (or the resonant frequency of the device), these environmental properties can be measured. In particular, by exploiting the sensitivity of piezoelectric substrate materials to physical parameters, it is possible to use SAW devices as temperature, humidity, and strain sensors [ 3 , 4 ], as well as for the detection of gases [ 5 ] and liquids [ 6 ]. Moreover, SAW devices are largely employed in telecommunications with more than three billion SAW components manufactured every year and used as band pass filters and resonators in radio receivers of mobile cell phones, base stations, and RF front ends [ 7 , 8 , 9 , 10 , 11 , 12 , 13 ].…”
Section: Introductionmentioning
confidence: 99%