Surface Acoustic Wave Strain Sensor With Ultra-Thin Langasite

Zhang, Jikai; Jin, Hao; Dong, Shurong; Ding, Rui; Chen, Jinkai; Xuan, Weipeng; Gao, Feng; Luo, Jikui

doi:10.1109/jsen.2022.3171821

Cited by 10 publications

(7 citation statements)

References 24 publications

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“…The poling process under a large electric field (tens MV/m), eventually in a temperature range between 70-100 °C, is commonly reported to generate piezoelectric films. [86][87][88] The only example of a SAW device based on PVDF composite was presented recently by Govindarajan et al [90] The authors dissolved/dispersed PVDF with different ceramic nanofillers in DMSO, and hot pressed at 179 °C (melting temperature of PVDF) for 20 min. Subsequently, the film where electrically polarized, to generate the beta phase in a non-contact method (corona pooling) with a voltage ff 12-15 kV at 2-3 cm for 30 min (Figure 3j)…”

Section: Processing Of Piezoelectric Materials For Polymeric Saw Devicesmentioning

confidence: 99%

“…Zhao et al conducted an interesting study in this regard, where they developed a strain sensor that can operate at temperatures up to 500 °C. [90] In their study, the authors considered the thermal expansion coefficient as an added value to the strain variation obtained by the sensor, thereby reducing the error induced by the temperature parameter. This approach effectively minimizes the impact of temperature on the performance of the strain sensor, making it suitable for high-temperature applications.…”

Section: Temperature Sensorsmentioning

confidence: 99%

“…As concerns the SAW devices based on PVDF, the research is still on fundamental studies and poor in documents. Significant advancements have been made in the development of SAW strain sensors, which leverage thin piezoelectric materials such as Quartz, [ 94 ] Langasite, [ 90 ] and LiNbO 3 , [ 95 ] providing a certain degree of bendability. In addition, there are SAW devices based on piezoelectric materials such as ZnO and AlN deposited on thin substrates like aluminum and glass, which also allow for bendability.…”

Section: Applicationsmentioning

confidence: 99%

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Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Lamanna

2023

Adv Materials Technologies

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Recently, there has been a remarkable increase in interest in piezoelectric thin films, particularly zinc oxide (ZnO) and aluminum nitride (AlN), deposited on flexible polymeric substrates. This is due to the rapid expansion of fields such as robotics, wearable devices, and the Internet of Things (IoT). These thin‐film layered structures have a wide range of applications, such as energy harvesting, sensing and biosensing, microfluidic sorting, pumping and mixing, and telecommunications. One of the most promising platforms is piezoelectric acoustic‐based thin‐film devices on inexpensive, recyclable, or disposable polymeric substrates. Their reliability, reproducibility, conformability, small size, and wireless control capabilities make them a leading candidate for the development of new wireless, fully automated, and digitized microsystems for IoT and wearable devices. This review examines recent advancements in the engineering of ZnO and AlN thin films on polymeric, flexible, and conformable surface acoustic wave (SAW) devices. Topics covered include the materials used, piezoelectric film deposition, device fabrication, and the latest applications of this technology as sensors and actuators.

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Section: Processing Of Piezoelectric Materials For Polymeric Saw Devicesmentioning

confidence: 99%

Section: Temperature Sensorsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

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Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Lamanna

2023

Adv Materials Technologies

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“…SAW can generate acoustic signals of MHz-GHz 5,6,7 , and has the characteristics of micro-nano scale and high sensitivity 5,7,8 due to its unique structure of interdigital transducers (IDTs) and piezoelectric effect. Therefore, high sensing performance of multi-parameter sensors based on the SAW principle has been developed, including gas detection 5,9,10,11,12,13,14 , temperature and humidity sensing 15,16,17 , and pressure and strain measurement 18,19,20 . The mechanisms in these sensing processes either rely on the mass loading 21,22,23 , acoustoelectric effect 24,25,26,27 , viscoelastic effect 28,29,30 generated by the combined sensitive materials, or are based on the thermal expansion and elastic effect of the piezoelectric crystal materials themselves 6,31,32,33 , and most of which achieve ideal capabilities.…”

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave sensing chip based on acoustic impedance effect: a method for rapid gas leakage detection and respiratory monitoring

Wang,

Cui,

Cheng

et al. 2024

Preprint

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The transformation of acoustic impedance (AI) in different media regulates the transmission and reflection characteristics of acoustic waves between media, thus enabling many interesting acoustic applications. Here we introduce for the first time a surface acoustic wave (SAW) chip based on the AI effect, which utilizes its piezoelectric effect and unique interdigital transducer to excite a mechanical wave (SAW) propagating along the surface of the piezoelectric crystal, and it features high sensitivity to surface-loaded media such as gases and humidity changes due to the SAW energy being localized on the surface. On this basis, we theoretically established the relationship between surface load AI and SAW propagation loss, and analyzed the influence of AI on acoustic propagation loss under different gas/humidity media using mass conservation and ideal gas state equations. Experimental measurements using SAW chips reveal that the differences in AI generated by different gases trigger different acoustic propagation loss signals, and can achieve wide-range (1-100 v/v%) gas monitoring, with fast response and recovery speeds reaching sub-second levels (t90<1 s, t10<0.5 s). This capability can also be perfectly utilized for human respiratory monitoring, accurately reflecting respiratory status, frequency, and intensity. Therefore, the SAW sensing method and chip based on the AI effect proposed in this work provide a new solution for in-situ detection of gas leaks and precise monitoring of human respiration.

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“…The substrate of the temperature sensor is a temperature-sensitive piezoelectric material LGS [ 4 ]. Furthermore, to measure the strain, a thinner substrate is used under the IDT to fabricate strain sensors [ 5 ], etc. As for filters, SAW filters can be formed by connecting multiple resonators in series and parallel.…”

Section: Introductionmentioning

confidence: 99%

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Liu,

Wang,

Zhang

et al. 2023

Sensors

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Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.

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Surface Acoustic Wave Strain Sensor With Ultra-Thin Langasite

Cited by 10 publications

References 24 publications

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Surface acoustic wave sensing chip based on acoustic impedance effect: a method for rapid gas leakage detection and respiratory monitoring

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

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