Surface acoustic wave velocity in single-crystal AlN substrates

Bu, Gang; Čiplys, D.; Shur, M. S.; Schowalter, L. J.; Schujman, Sandra; Gaška, R.

doi:10.1109/tuffc.2006.1588412

Cited by 85 publications

(39 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The same sizes as listed in Table 1 were used in this simulation. The properties of the piezoelectric layer are extracted from the literature [31] and provided in Table 2. The boundary conditions are those shown in …”

Section: Analysis Of Electrical Resultsmentioning

confidence: 99%

Low frequency piezoelectric energy harvesting at multi vibration mode shapes

Rezaeisaray

Gowini

Sameoto

et al. 2015

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Section: Analysis Of Electrical Resultsmentioning

confidence: 99%

Low frequency piezoelectric energy harvesting at multi vibration mode shapes

Rezaeisaray

Gowini

Sameoto

et al. 2015

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

“…2). All of the constants of AlN were then derived according to the above (4)- (20). The comparison between the currently derived constants and published ones [18]- [21], [28] is summarized in Table I.…”

Section: Resultsmentioning

confidence: 99%

High-temperature electromechanical characterization of AlN single crystals

Kim

Dalmau

et al. 2015

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

Hexagonal AlN is a non-ferroelectric material and does not have any phase transition up to its melting point (>2000°C), which indicates the potential use of AlN for hightemperature sensing. In this work, the elastic, dielectric, and piezoelectric constants of AlN single crystals were investigated at elevated temperatures up to 1000°C by the resonance method. We used resonators of five different modes to obtain a complete set of material constants of AlN single crystals. The electrical resistivity of AlN at elevated temperature (1000°C) was found to be greater than 5 × 10 cm. 10 Ω ⋅The resonance frequency of the resonators, which was mainly determined by the elastic compliances, decreased linearly with increasing temperature, and was characterized by a relatively low temperature coefficient of frequency, in the range of −20 to −36 ppm/°C. For all the investigated resonator modes, the elastic constants and the electromechanical coupling factors exhibited excellent temperature stability, with small variations over the full temperature range, <11.2% and <17%, respectively. Of particular significance is that due to the pyroelectricity of AlN, both the dielectric and the piezoelectric constants had high thermal resistivity even at extreme high temperature (1000°C). Therefore, high electrical resistivity, temperature independence of electromechanical properties, as well as high thermal resistivity of the elastic, dielectric, and piezoelectric properties, suggest that AlN single crystals are a promising candidate for high-temperature piezoelectric sensing applications.

show abstract

“…Among them, 11 have an experimental character [15][16][17][18][19][20][21][22][23] and the other 34 were derived by using calculation methods . Some of these studies did not provide complete sets of C ij values, showing only C 44 [20,21] or not presenting C 12 [17] nor C 11 , C 12 and C 44 [39] values for the calculations. Note that, for a good estimation, the C 13 and C 33 assessments in Ref.…”

Section: Methodsmentioning

confidence: 99%