Surface acoustic waves in thin films of barium strontium titanate on magnesium oxide substrates

Biryukov, S. V.; Golovko, Yu. I.; Karapetyan, G. Ya.; Masychev, S. I.; Мухортов, В. М.

doi:10.1134/s1063785011030084

Cited by 9 publications

(3 citation statements)

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“…To achieve desirable properties of developing acoustic devices, it is required applying the sound-conducting substrates with a higher sound velocity and decreasing the geometrical sizes of transmitting and receiving interdigital transducers. However, these ways have limitations [2]. The sound velocity in substrate usually is fixed and it is very complicated to make a gap width between electrodes of interdigital transducer (IDT), converting electrical energy into acoustic energy and vice versa, less than 0:5μm by the lithographic method.…”

Section: Introductionmentioning

confidence: 99%

“…Recently, thin barium titanate (BT) epitaxial films have been studied extensively due to their potential applications in micro-and nanoelectronic devices [2,3]. The high dielectric constant of BT, the strong dependence of the permittivity on the electric field and low loss suitable for use over a wide frequency and temperature range allow developing compact frequency-tunable microwave devices.…”

Section: Introductionmentioning

confidence: 99%

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Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

Timoshenko

Kalinchuk

Широков

2018

International Journal of Smart and Nano Materials

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The frequency dependence of scattering parameters of interdigital surface acoustic wave transducers placed on ferroelectric barium titanate (BaTiO 3 ) epitaxial film in c-phase coated over magnesium oxide has been studied using the finite-element method (FEM) approach along with the perfectly matched layer (PML) technique. The interdigital transducer which has a comb-like structure with aluminum electrodes excites the mechanical wave. The distance between the fingers allows tuning the frequency properties of the wave propagation. The magnesium oxide is taken as the substrate. The two-dimensional model of two-port surface acoustic wave filter is created to calculate scattering parameters and to show how to design the fixture in COMSOL TM . Some practical computational challenges of finite element modeling of SAW devices in COMSOL TM are shown. The effect of lattice misfit strain on acoustic properties of heterostructures of BaTiO 3 epitaxial film in c-phase at room temperature is discussed in present article for two lowfrequency surface acoustic resonances. ARTICLE HISTORY

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

Timoshenko

Kalinchuk

Широков

2018

International Journal of Smart and Nano Materials

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“…6 Despite efforts to achieve electrical tuning in AlN-based resonators through implementation of sound guiding substrates and varying device dimensions, tunability in these systems is less than 1%. 7,8 Furthermore, current SAW and BAW devices must employ semiconductor or MEMS switches for frequency selection. As such, there exists a tremendous potential for the development of tunable and switchable thin film acoustic resonators.…”

mentioning

confidence: 99%

Strain engineered barium strontium titanate for tunable thin film resonators

Khassaf

Khakpash

Sun

et al. 2014

Applied Physics Letters

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Piezoelectric properties of epitaxial (001) barium strontium titanate (BST) films are computed as functions of composition, misfit strain, and temperature using a non-linear thermodynamic model. Results show that through adjusting in-plane strains, a highly adaptive rhombohedral ferroelectric phase can be stabilized at room temperature with outstanding piezoelectric response exceeding those of lead based piezoceramics. Furthermore, by adjusting the composition and the in-plane misfit, an electrically tunable piezoelectric response can be obtained in the paraelectric state. These findings indicate that strain engineered BST films can be utilized in the development of electrically tunable and switchable surface and bulk acoustic wave resonators.

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Effect of Lattice Misfit Strain on Surface Acoustic Waves Propagation in Barium Titanate Thin Films

Timoshenko

Kalinchuk

Широков

et al. 2019

Dynamics and Control of Advanced Structures and Machines

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Surface acoustic waves in thin films of barium strontium titanate on magnesium oxide substrates

Cited by 9 publications

References 0 publications

Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

Strain engineered barium strontium titanate for tunable thin film resonators

Effect of Lattice Misfit Strain on Surface Acoustic Waves Propagation in Barium Titanate Thin Films

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