1994
DOI: 10.1016/0039-6028(94)90658-0
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Surface analysis by Secondary Ion Mass Spectrometry (SIMS)

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Cited by 182 publications
(105 citation statements)
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“…Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a technique allowing identification and localization of unknown molecules at sample surfaces [1]. It has several advantages over alternative methods, e.g., its sensitivity to all elements, detection of all isotopes, excellent spatial resolution (100 nm), and simultaneous imaging of the surface distribution of detected elements and molecules [2].…”
Section: Introductionmentioning
confidence: 99%
“…Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a technique allowing identification and localization of unknown molecules at sample surfaces [1]. It has several advantages over alternative methods, e.g., its sensitivity to all elements, detection of all isotopes, excellent spatial resolution (100 nm), and simultaneous imaging of the surface distribution of detected elements and molecules [2].…”
Section: Introductionmentioning
confidence: 99%
“…Apesar de ser possível atualmente fazer uma varredura do laser pela superfície com resoluções laterais da ordem de mícrons 4 , a técnica necessita de uma matriz, o que elimina a possibilidade de se estudar amostras in situ, além de ser altamente destrutiva. Uma das técnicas que mais se desenvolveu nos últimos 20 anos na área de análise de superfícies é a técnica de espectrometria de massas de íons secundários formados a partir do impacto de íons primários monoatômicos ou poliatômicos com a superfície (SSIMS -"Static Secondary Ion Mass Spectrometry") [5][6][7] . Esta técnica pode fornecer informação química de monocamadas adsorvidas sobre todos os tipos de superfícies e pode vir a ser a técnica preferida para análise química superficial em um futuro próximo.…”
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“…In the latter the conditions of silicon wafers have to be controlled with great finesse. In the array of surface analysis techniques available today [10], time-of-flight secondary ion mass spectroscopy with singly charged projectiles offers a sensitivity of ~10 8 atoms/cm 2 for most transition metals on oxidized silicon, parallel mass detection which includes molecular ions and a lateral resolution as low as 100 nm [11]. The finding of very high yields of atomic and molecular secondary ions that are emitted from oxidized silicon surfaces following the impact of slow (few Kev/u) highly charged ions (e. g. Xe 44+ ) motivated the development of a time-of-flight secondary ion mass spectrometry scheme with HCI [3].…”
Section: Beam Requirements For Surface Analysis With Highly Charged Ionsmentioning
confidence: 99%