2024
DOI: 10.1007/s43673-023-00104-4
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Surface and bulk acoustic wave resonators based on aluminum nitride for bandpass filters

Xian-Hu Zha,
Jing-Ting Luo,
Ran Tao
et al.

Abstract: Bandpass filters with high frequency and wide bandwidth are indispensable parts of the fifth-generation telecommunication technologies, and currently, they are mainly based on surface and bulk acoustic wave resonators. Owing to its high mechanical strength, excellent stability at elevated temperatures, good thermal conductivity, and compatibility with complementary metal-oxide-semiconductor technology, aluminum nitride (AlN) becomes the primary piezoelectric material for high-frequency resonators. This review … Show more

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