Surface and electrical properties of NiCr thin films prepared by DC magnetron sputtering

Abstract

Several batches of NiCr alloy thin fi lms with different thickness were prepared in a multitargets magnetron sputtering apparatus by changing sputtering time while keeping sputtering target power of Ni and Cr fi xed. Then the as-deposited fi lms were characterized by energy-dispersive X-Ray spectrometer (EDX), Atomic Force Microscope (AFM) and four-point probe (FPP) to measure surface grain size, roughness and sheet resistance. The fi lm thickness was measured by Alpha-Step IQ Profi lers. The thickness dependence of surface roughness, lateral grain size and resistivity was also studied. The experimental results show that the grain size increases with fi lm thickness and the surface roughness reaches the order of nanometer at all fi lm thickness. The as-deposited fi lm resistivity decreases with fi lm thickness.

Nanoscopic Investigation of Magnetic Thin Films by Means of Magnetic Force Microscopy Technique

“…strongly depend on various factors such as: the structure and orientation, composition, thickness, grain size, type and temperature of substrates etc. [8][9][10][11][12][13][14][15]. In addition, in the case of the magnetic thin films, their magnetic properties are conditioned by the magnetic domain structure [16][17][18].…”

Development of the invar36 thin film strain gauge sensor for strain measurement

“…Several investigations on the behavior of thin films for their possible application as strain gauges are reported by various investigators [5][6][7][8]. An ideal strain gauge sensor should posses fairly good strain sensitivity to detect a very small change in the input.…”