Fundamentals of x-ray fluorescence spectrometry and X-ray emission spectrometry in the case of electron probe x-ray microanalysis and low-energy electron induced x-ray spectrometry are compared. The different aluminum and titanium compounds occurring in steel can be investigated by examining soft x-ray spectra, arising from valence shell orbitals. The non-metallic inclusions were isolated by galvanometric electrolysis. In the case of the speciation of titanium, direct electron bombardment of the sample is used to generate soft x-rays. By investigating the Ti L lines, titanium carbide, nitride and sulfide can be distinguished. To specify aluminum compounds, the Kb transition in the x-ray fluorescence spectrum was examined. The concentration of aluminum oxide and nitride in precipitates of special steel qualities can be determined with a satisfactory determination limit. Finally, pre-operational studies for the determination of different silicon inclusions using electron excitation were carried out.