Surface and Thin-Film Analysis

Bubert, H.; Riviére, J.C.; Arlinghaus, Heinrich F.; Hutter, Herbert; Jenett, Holger; Bauer, Péter; Palmetshofer, L.; Fabry, L.; Pahlke, S.; Quentmeier, A.; Hinrichs, Karsten; Hill, Wieland; Gruska, Bernd; Röseler, Arthur; Friedbacher, Gernot

doi:10.1002/14356007.b06_023

Cited by 32 publications

(13 citation statements)

References 425 publications

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“…For all optical methods, one or more of these characteristics is observed and then related to the material features [79]. Examples are: total reflection X-ray fluorescence analysis (TXRF), energy-dispersive X-ray spectroscopy (EDXS), grazing incidence X-ray, glow discharge optical emission spectroscopy (GD-OES), reflection absorption IR spectroscopy (RAIRS), surface-enhanced Raman scattering (SERS), and UV-Vis-IR ellipsometry (ELL) [65,80]. When the correspondent signals are analyzed, one will usually achieve information about the surface of the probe and/or about the material itself.…”

Section: Optical Densitymentioning

confidence: 99%

Thickness Measurement Methods for Physical Vapor Deposited Aluminum Coatings in Packaging Applications: A Review

Lindner

Schmid

2017

Coatings

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Abstract:The production of barrier packaging materials, e.g., for food, by physical vapor deposition (PVD) of inorganic coatings such as aluminum on polymer substrates is an established and well understood functionalization technique today. In order to achieve a sufficient barrier against gases, a coating thickness of approximately 40 nm aluminum is necessary. This review provides a holistic overview of relevant methods commonly used in the packaging industry as well as in packaging research for determining the aluminum coating thickness. The theoretical background, explanation of methods, analysis and effects on measured values, limitations, and resolutions are provided. In industrial applications, quartz micro balances (QCM) and optical density (OD) are commonly used for monitoring thickness homogeneity. Additionally, AFM (atomic force microscopy), electrical conductivity, eddy current measurement, interference, and mass spectrometry (ICP-MS) are presented as more packaging research related methods. This work aims to be used as a guiding handbook regarding the thickness measurement of aluminum coatings for packaging technologists working in the field of metallization.

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Section: Optical Densitymentioning

confidence: 99%

Thickness Measurement Methods for Physical Vapor Deposited Aluminum Coatings in Packaging Applications: A Review

Lindner

Schmid

2017

Coatings

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“…Another difference is that while in RBS the back-scattered ions are detected, in ERDA the target atoms are kicked out by heavier ions and leave the sample in the forward direction (0°<θ<90°). By combining time of flight information together with the energy measurement the mass of the recoiled atom is measured and depth profiling is acquired [63].…”

Section: Elastic Recoil Detection Analysismentioning

confidence: 99%

Metastable YAlN and ScAlN thin films: growth and characterization

Žukauskaitė¹

2012

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ScxAl1-xN and YxAl1-xN thin films were deposited in a ultra high vacuum system using reactive magnetron co-sputtering from elemental Al, Sc and Y targets in Ar/N2. Their mechanical, electrical, optical, and piezoelectrical properties were investigated with the help of transmission electron microscopy, xray diffraction, ellipsometry, I-V and C-V measurements, and two different techniques for piezoelectric characterization: piezoresponse force microscopy and

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“…Rutherford backscattering spectroscopy (RBS) (Bubert et al, 2002) was also employed to complete the surface characterization of the films. For this, a beam of He + with energy of 2.2 MeV was used.…”

Section: Experimental Characterizationmentioning

confidence: 99%