“…Etching in H 2 SO 4 /H 2 O 2 also leaves the surface of GaAs rich in arsenic that is also oxidized. The surface of GaAs is thus composed of an oxide layer not necessarily in the same stoichiometric ratio of Ga 2 O 3 and As 2 O 3 [34,35]. Although, GaAs itself is a semiconductor but its oxides are insulators.…”