2001
DOI: 10.1021/la010333p
|View full text |Cite
|
Sign up to set email alerts
|

Surface Characterization and Electrochemical Properties of Alkyl, Fluorinated Alkyl, and Alkoxy Monolayers on Silicon

Abstract: Alkyl and fluorinated alkyl monolayers covalently bonded to the silicon (111) surface have been prepared by UV illumination of the H-Si(111) surface while immersed in a solution of olefin precursor under high vacuum. An alkoxy monolayer covalently bonded to the silicon (111) surface is formed by the reaction of the H-Si(111) surface with a heated solution of primary alcohol precursors under high vacuum. Ellipsometry, X-ray photoelectron spectroscopy, and atomic force microscopy are used to characterize the thr… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

7
90
1

Year Published

2003
2003
2012
2012

Publication Types

Select...
5
3
1

Relationship

0
9

Authors

Journals

citations
Cited by 87 publications
(98 citation statements)
references
References 28 publications
7
90
1
Order By: Relevance
“…In comparison, only few reports are available on the characterization of SAMs on semiconductor surface [25][26][27][28], a system which differs from that of the metal electrode due to the additional space charge layer present on the semiconducting surface. For example, organic thin films formed by the reaction of Grignard reagent with oxide free silicon surface have been recently discussed in terms of an ideal capacitive behavior at silicon electrode/aqueous electrolyte interface [29][30][31]. The electrical characterization of alkyl monolayers on Si/SiO 2 has been discussed in terms of the suppression of charge-carrier tunneling [31].…”
Section: Introductionmentioning
confidence: 99%
“…In comparison, only few reports are available on the characterization of SAMs on semiconductor surface [25][26][27][28], a system which differs from that of the metal electrode due to the additional space charge layer present on the semiconducting surface. For example, organic thin films formed by the reaction of Grignard reagent with oxide free silicon surface have been recently discussed in terms of an ideal capacitive behavior at silicon electrode/aqueous electrolyte interface [29][30][31]. The electrical characterization of alkyl monolayers on Si/SiO 2 has been discussed in terms of the suppression of charge-carrier tunneling [31].…”
Section: Introductionmentioning
confidence: 99%
“…The coverage of modified surface was calculated by using the integrated peak areas of the carbon (1s) and silicon (2p) XPS narrow scans. areal density of the adsorbate to maximum areal density [5,26,27]. The maximum areal densities were adapted to the value of the cross-sectional area of each molecule, which are 18.0 Å 2 (ODMS), 27.5 Å 2 (FAS), and 20.0 Å 2 , respectively.…”
Section: Formation Of Organosilane Monolayer On Silicon Surfacementioning
confidence: 99%
“…The bottom contact was highly doped Si (100), due to its compatibility with CMOS. Because prior to this work most of the monolayer assembly/characterization that had been performed was on Si (111) [16][17][18][19][20][21][22][23], we performed extensive characterization to ensure that the monolayers assembled on Si (100) were comparable in quality to those assembled on Si (111) [24]. Additionally, prior work by our group was performed with a lightly doped Si substrate [16]; however, we have switched to highly (degenerately) doped Si in order to ensure that the electrical characteristics observed from the devices are dominated by inherent molecular properties, rather than depletion in the substrate due to the work function mismatch between the lightly doped bottom Si contact and the Ag top contact [24][25].…”
Section: The Fabrication and Characterization Of Cmos-compatible mentioning
confidence: 99%