With the development of new power systems, the level of automation and unmanned operation in substations continues to rise. The changes in the status and fault conditions of various electrical equipment are receiving increasing attention. Isolating switches, as crucial components widely used in substations, require vigilant status monitoring. The closing and opening operations of isolating switches encompass all switch-type devices, making their intelligence and predictive capabilities key aspects of substation automation. In practical production, the mechanical status of switch devices during the closing operation is unpredictable. There is a lack of effective monitoring and analysis methods to ensure that the closing operation is in a stable and normal mechanical state. Particularly, there is a deficiency in accurate and reliable judgment criteria for various types of knife switches and switch-type mechanical structures, whether they are fully closed or open. Traditional visual judgment methods are unreliable and ineffective in assessing the operational effectiveness. this document cited a method based on integrated MEMS micro-nano sensors, analyzing its technical challenges and methods. It suggests that for these monitoring systems, MEMS resistive pressure sensors and temperature sensors can be employed to monitor pressure and temperature during the opening and closing of isolation switches. A "double confirmation" method is proposed for comprehensive determination. Regarding the high-voltage resistance of sensor components, using modified silicon dioxide materials, along with insulation resin coatings and ceramic insulation structures, can enhance the components' resistance to high voltage. For electromagnetic interference resilience, a dual-function electromagnetic interference-resistant structure based on a metasurface is recommended. Integrating these components and communication devices can lead to the design of a high-voltage substation isolation switch monitoring system with both high-voltage resistance and electromagnetic interference resistance.