1998
DOI: 10.1116/1.581507
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Surface charge neutralization of insulating samples in x-ray photoemission spectroscopy

Abstract: Obtaining high resolution x-ray photoemission spectroscopy (XPS) spectra of insulating samples has long been a problem because of difficulty controlling sample surface potentials. A flood of low energy electrons has traditionally been used to control surface potential, but as monochromatized instruments with small, intense x-ray beams have become available, control has become much more difficult, particularly on larger samples. Increasing the current or energy from the flood gun does not improve the control ap… Show more

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Cited by 93 publications
(28 citation statements)
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“…XPS analyses were performed with a Quantum 2000 Scanning ESCA Microprobe (Physical Electronics, PHI, Eden Prairie, MN) equipped with a spherical capacitor energy analyzer used in the fixed analyzer transmission mode. The base pressure of the system was less than 10 Ϫ9 Torr, and spectra were typically acquired at a pressure below 5 ϫ 10 Ϫ9 Torr with a monochromatized Al K ␣ source operating at 100 W, with a beam diameter of 100 m. Sample charge-up was compensated for with a flux of low-energy electrons combined with a small current of low-energy positive ions (26). Under these conditions, the energy resolution for detailed scans [full width at half-maximum measured on silver Ag(3d 5/2 )] was 0.8 eV.…”
Section: X-ray Photoelectron Spectroscopy (Xps)mentioning
confidence: 99%
“…XPS analyses were performed with a Quantum 2000 Scanning ESCA Microprobe (Physical Electronics, PHI, Eden Prairie, MN) equipped with a spherical capacitor energy analyzer used in the fixed analyzer transmission mode. The base pressure of the system was less than 10 Ϫ9 Torr, and spectra were typically acquired at a pressure below 5 ϫ 10 Ϫ9 Torr with a monochromatized Al K ␣ source operating at 100 W, with a beam diameter of 100 m. Sample charge-up was compensated for with a flux of low-energy electrons combined with a small current of low-energy positive ions (26). Under these conditions, the energy resolution for detailed scans [full width at half-maximum measured on silver Ag(3d 5/2 )] was 0.8 eV.…”
Section: X-ray Photoelectron Spectroscopy (Xps)mentioning
confidence: 99%
“…Charge neutralization was employed by compensating the sample surface with both low-energy electrons and low-energy ions during data collection. This procedure reduced the charging effects generally observed in insulating samples and improved energy resolution of the respective peaks [25].…”
Section: Surface Chemical Composition Analyzed By Xpsmentioning
confidence: 98%
“…This is necessary especially when using monochromatized X-ray radiation. (140) This approach also minimizes the shift observed when using nonmonochromatic radiation. Another method is to use a metallic grid (e.g.…”
Section: Insulatorsmentioning
confidence: 99%