1990
DOI: 10.1007/bf00324008
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Surface cleaning using sputtering

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Cited by 89 publications
(38 citation statements)
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“…The mechanism by which plasma modification of mica takes place is unclear (see e.g. [24,25]). Most probably, removal of cations and adsorbates from the mica cleavage plane is involved.…”
Section: Resultsmentioning
confidence: 99%
“…The mechanism by which plasma modification of mica takes place is unclear (see e.g. [24,25]). Most probably, removal of cations and adsorbates from the mica cleavage plane is involved.…”
Section: Resultsmentioning
confidence: 99%
“…The coefficient C 13 depends on the mass ratio between the colliding particles and the nuclear charge and is specified in [30]. For a universal potential of the Lenz-Jensen type, a value m = 0.25 results [31].…”
Section: Discussionmentioning
confidence: 99%
“…7,22,23 This particular situation can be related to the case where several adislands are situated on the surface by the following argument. If one N-adisland is on the surface, the nominal coverage is…”
Section: B Sputter Yieldmentioning
confidence: 99%