Surface damage formation during ion-beam thinning of samples for transmission electron microscopy

McCaffrey, J. P.; Phaneuf, Michael W.; Madsen, Lynnette D.

doi:10.1016/s0304-3991(00)00096-6

Cited by 213 publications

(122 citation statements)

References 9 publications

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“…33 used in our theoretical calculations and the permittivity of the gold in our sample. We substantiate this point of view by the fact that the procedure of thinning the sample using FIB leads to some gallium contamination and surface amorphization of the gold, which (depending on the FIB conditions used) can influence up to tens of nanometres for each of the groove surfaces 34,35 . Note that despite the fact that this (probably) FIB-related damage affects the gold permittivity in the entire energy range considered, the discrepancy between measurements and 2D simulations at large groove widths (W\100 nm) is in any case expected as the EELS peaks are related to physically different phenomena (threedimensional (3D) localized SP and 2D groove aGSP mode, respectively).…”

Section: Numerical Simulationssupporting

confidence: 55%

Extremely confined gap surface-plasmon modes excited by electrons

et al. 2014

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High-spatial and energy resolution electron energy-loss spectroscopy (EELS) can be used for detailed characterization of localized and propagating surface-plasmon excitations in metal nanostructures, giving insight into fundamental physical phenomena and various plasmonic effects. Here, applying EELS to ultra-sharp convex grooves in gold, we directly probe extremely confined gap surface-plasmon (GSP) modes excited by swift electrons in nanometre-wide gaps. We reveal the resonance behaviour associated with the excitation of the antisymmetric GSP mode for extremely small gap widths, down to B5 nm. We argue that excitation of this mode, featuring very strong absorption, has a crucial role in experimental realizations of non-resonant light absorption by ultra-sharp convex grooves with fabricationinduced asymmetry. The occurrence of the antisymmetric GSP mode along with the fundamental GSP mode exploited in plasmonic waveguides with extreme light confinement is a very important factor that should be taken into account in the design of nanoplasmonic circuits and devices.

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Section: Numerical Simulationssupporting

confidence: 55%

Extremely confined gap surface-plasmon modes excited by electrons

et al. 2014

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“…ε = ∆l/l ∼ 0.6% denotes the tensile strain. f artifacts have mainly concentrated on substrate materials and semiconductors [17,18]. However, some general conclusions can be made on the basis of our process parameters.…”

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confidence: 99%

Strong Gate Coupling of High-Q Nanomechanical Resonators

et al. 2010

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The detection of mechanical vibrations near the quantum limit is a formidable challenge since the displacement becomes vanishingly small when the number of phonon quanta tends towards zero. An interesting setup for on-chip nanomechanical resonators is that of coupling them to electrical microwave cavities for detection and manipulation. Here we show how to achieve a large cavity coupling energy of up to (2π) 1 MHz/nm for metallic beam resonators at tens of MHz. We used focused ion beam (FIB) cutting to produce uniform slits down to 10 nm, separating patterned resonators from their gate electrodes, in suspended aluminum films. We measured the thermomechanical vibrations down to a temperature of 25 mK, and we obtained a low number of about twenty phonons at the equilibrium bath temperature. The mechanical properties of Al were excellent after FIB cutting and we recorded a quality factor of Q ∼ 3 × 10 5 for a 67 MHz resonator at a temperature of 25 mK. Between 0.2K and 2K we find that the dissipation is linearly proportional to the temperature. Keywords nanomechanics, NEMS, quantum limit, detection, dissipationThe measurement of small-amplitude vibrations in mechanical systems is becoming an increasingly interesting problem [1,2]. From the point of view of basic science, the study of mechanical systems close to the quantum limit has attracted a lot of interest recently [3,4]. The endeavor towards the ground state of the harmonic phonon oscillations has been going on in various physical systems such as in optomechanics [5][6][7], or in electrically coupled beam resonators which have been measured using single-electron transistors [4,8], or lately, with on-chip microwave cavities [9][10][11][12].The quantum challenge is posed by several issues, including the relatively low frequency (f 0 ∼ 10 MHz), of the lowest modes in suspended beams. The quantum limit implies stringent requirements on temperature, since hf 0 needs to be small in comparison to k B T . On the other hand, at higher frequencies, the coupling to measuring systems diminishes rapidly. Third, the zero-point vibration amplitudes x ZP = /2mω 0 , where m is the effective mass and ω 0 = 2πf 0 is the angular frequency, are vanishingly small even at the atomic scale. Very recently, O'Connell et al.[13] demonstrated a piezoelectric mechanical mode at the quantum ground state by using a coupling to a superconducting qubit. However, bringing a purely mechanical mode to the quantum limit remains an ongoing quest, with the goal becoming a reality probably in the near future.Micromechanical resonators are also used in applications as detectors. The best devices take advantage of the trend to smaller size and higher frequencies, and will soon approach sensing at the atomic mass unit level [14,15]. They could also be operated as sensors of position, force, or high-frequency electromagnetic fields.For conductive resonators, capacitive coupling to an electrical measuring apparatus is useful for readout. In contrast to magnetomotive or optical detection, one can obtain v...

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“…In order to minimize the damaged amorphous layers, moderate-milling conditions such as low voltage, low current, 22,23) and low incidence angle 24) were proposed. We reduced the acceleration voltage of Ga ions in the FIB from 40 kV to 10 kV for studying its effect.…”

Section: Discussionmentioning

confidence: 99%

TEM Sample Preparation for Microcompressed Nanocrystalline Ni

et al. 2008

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Ultra-large compressive plasticity at room temperature has recently been observed in electrodeposited nanocrystalline nickel (nc-Ni) under micro-scale compression (Pan, Kuwano, Fujita, Chen, Nano Letters 7, 2108). The evolution of microstructure of nc-Ni during ultra-large deformation is outlined at a variety of strain levels, with TEM observations in combination with a TEM sample preparation technique using focused ion beam (FIB).This paper demonstrates focused ion beam (FIB) technique to prepare transmission electron microscopy (TEM) samples from microcompressed specimens. There has been a demand to prepare TEM samples from a point of interest to study microstructures on atomic scales. Conventional techniques used to make TEM samples, such as chemical polishing or ion-sputtering milling, cannot provide reliable opportunity to make TEM samples from a point of interest. With this technique, the deformation mechanism on atomic scales can be fairly connected with the result of microcompression test, which is available for size-limited materials.

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Surface damage formation during ion-beam thinning of samples for transmission electron microscopy

Cited by 213 publications

References 9 publications

Extremely confined gap surface-plasmon modes excited by electrons

Extremely confined gap surface-plasmon modes excited by electrons

Strong Gate Coupling of High-Q Nanomechanical Resonators

TEM Sample Preparation for Microcompressed Nanocrystalline Ni

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