Surface dopant concentration monitoring using noncontact surface charge profiling

Roman, P.; Staffa, J.; Fakhouri, S.; Brubaker, Matthew D.; Rużyłło, Jerzy; Torek, K.; Kamieniecki, E.

doi:10.1063/1.366972

Cited by 19 publications

(7 citation statements)

References 6 publications

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“…The slope of the I signal / versus plot gives the surface lifetime. The signal also contains the substrate doping density or resistivity, leading to contactless resistivity measurements [52]. Resistivity maps of epitaxial layers are shown in figure 20 [53].…”

Section: Frequency-dependent Surface Photovoltagementioning

confidence: 99%

Surface voltage and surface photovoltage: history, theory and applications

Schroder

2001

Meas. Sci. Technol.

245

172

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Surface voltage and surface photovoltage measurements have become important semiconductor characterization tools, largely because of the availability of commercial equipment and the contactless nature of the measurements. The range of the basic technique has been expanded through the addition of corona charge. The combination of surface charge and illumination allows surface voltage, surface barrier height, flatband voltage, oxide thickness, oxide charge density, interface trap density, mobile charge density, oxide integrity, minority carrier diffusion length, generation lifetime, recombination lifetime and doping density to be determined. In this review I shall briefly review the history of surface voltage, then discuss the principles of the technique and give some examples and applications.

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Section: Frequency-dependent Surface Photovoltagementioning

confidence: 99%

Surface voltage and surface photovoltage: history, theory and applications

Schroder

2001

Meas. Sci. Technol.

245

172

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“…Assuming that a given sample surface is in inversion both before and after a certain treatment, any changes in w must indicate a change in the sub-surface contamination level [628±630]. In a recent example, Roman et al monitored the effective sub-surface p-type doping concentration in boron-doped Si wafers [630]. Boron can be deactivated by pairing with hydrogen or metals, particularly Cu and Fe, all of which may originate from surface polishing processes.…”

Section: Surface Band Bending ± Other Methodsmentioning

confidence: 99%

Surface photovoltage phenomena: theory, experiment, and applications

Kronik

Shapira

1999

Surface Science Reports

1,527

804

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“…22 Here n i is the intrinsic carrier concentration in Si. 22 Here n i is the intrinsic carrier concentration in Si.…”

Section: ͑36͒mentioning

confidence: 99%

Theory of space-charge layer dynamics at oxide-semiconductor interfaces under optical modulation and detection by laser photocarrier radiometry

Mandelis

2005

Journal of Applied Physics

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Articles you may be interested inAnalysis of size quantization and temperature effects on the threshold voltage of thin silicon film double-gate metal-oxide-semiconductor field-effect transistor (MOSFET)The dynamic theory of the optically modulated space-charge layer ͑SCL͒ resulting from band bending at a Si-SiO 2 interface was developed in terms of the density of interface charges occupying band-gap energy states. Expressions were derived for these interface charge densities, interacting with the free-carrier density wave generated in the SCL and in the quasineutral region ͑bulk͒ by an intensity-modulated super-band-gap laser. The residual and modulated interface charge coverage affects the band-edge-to-impurity state recombination and the concomitant near-infrared photon emission comprising the photocarrier radiometry ͑PCR͒ signal. The PCR theory incorporating these effects was further developed. It was found to involve the dc, fundamental, and entire harmonic spectrum of the excitation frequency as a result of the optical modulation of the curvature of the energy bands and the SCL width at the interface.

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Surface dopant concentration monitoring using noncontact surface charge profiling

Cited by 19 publications

References 6 publications

Surface voltage and surface photovoltage: history, theory and applications

Surface voltage and surface photovoltage: history, theory and applications

Surface photovoltage phenomena: theory, experiment, and applications

Theory of space-charge layer dynamics at oxide-semiconductor interfaces under optical modulation and detection by laser photocarrier radiometry

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