2010
DOI: 10.1088/0957-4484/21/35/355301
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Surface-enhanced Raman scattering on gold quasi-3D nanostructure and 2D nanohole arrays

Abstract: A new method was developed to fabricate unique gold quasi-3D plasmonic nanostructures on poly(dimethylsiloxane) PDMS and 2D nanohole arrays on silicon as surface-enhanced Raman scattering (SERS) substrates using electron beam lithography (EBL) with negative tone resist Ma-N 2403 and soft lithography. The size and shape of nanopillars fabricated by EBL were well controlled via different beam conditions. An enhancement factor (EF) as high as 6.4 x 10(5) was obtained for 4-mercaptopyridine molecules adsorbed on t… Show more

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Cited by 87 publications
(83 citation statements)
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“…However, surface roughness is hard to control and it is most desirable for SERS applications to have reproducible and robust signals. Therefore, nanoscience and nanotechnology have been extensively used in recent years for SERS applications [11][12][13], especially nanofabrication [14] using techniques such as Electron Beam Lithography [11,12,[15][16][17], Focused Ion Beam [11,18], Nanoimprint Lithography (soft [11,[19][20][21] and hard [15]), Nanosphere Lithography [11,20,22]. With these nanostructured samples, SERS now cover fields like biosensing [4], electrochemical and environmental analysis [14] and new multitechniques [13] such as Femtosecond Stimulated Raman spectroscopy (FSRS) [23] or Tip-enhanced Raman spectroscopy (TERS) [24].…”
Section: Introductionmentioning
confidence: 99%
“…However, surface roughness is hard to control and it is most desirable for SERS applications to have reproducible and robust signals. Therefore, nanoscience and nanotechnology have been extensively used in recent years for SERS applications [11][12][13], especially nanofabrication [14] using techniques such as Electron Beam Lithography [11,12,[15][16][17], Focused Ion Beam [11,18], Nanoimprint Lithography (soft [11,[19][20][21] and hard [15]), Nanosphere Lithography [11,20,22]. With these nanostructured samples, SERS now cover fields like biosensing [4], electrochemical and environmental analysis [14] and new multitechniques [13] such as Femtosecond Stimulated Raman spectroscopy (FSRS) [23] or Tip-enhanced Raman spectroscopy (TERS) [24].…”
Section: Introductionmentioning
confidence: 99%
“…Nanoholes, nanovoids, Nanodomes, nanoclusters, and nanoarrays are 3D nanostructures, which have been successfully fabricated. Nanoholes can be prepared using electron beam lithography (EBL) [67,71], focused ion beam [68], or soft lithography [66,69,121]. Nanovoid arrays are prepared using porous anodic alumina [122] or the combination of nanosphere lithography and electrochemical deposition technique [65,72,123].…”
Section: Solid Structuresmentioning
confidence: 99%
“…Nanovoid arrays are prepared using porous anodic alumina [122] or the combination of nanosphere lithography and electrochemical deposition technique [65,72,123]. Plasmonic properties were tuned by changing the diameter and periodicity of the nanoholes to obtain maximum SERS enhancement [67,68,71]. Changing the diameter and height in nanovoids tunes their plasmonic properties [65,72].…”
Section: Solid Structuresmentioning
confidence: 99%
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