2007
DOI: 10.1063/1.2735675
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Surface heterostructure nanomechanical actuators with atomic resolution

Abstract: A continuously tunable vertical actuator with subnanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum wells. Deflections from −17 to 5 nm with a precision better than three atomic layers have been measured.

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Cited by 5 publications
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“…We then extracted the gap width by combining the position data of the fiber with a measurement of the cantilever profile. It might be noted that, if one desires an electronic device, the gap width could be actively controlled using several methods, one of which is described by [32]. Figure 4a illustrates how the photoluminescence (PL) spectrum changes with position along the cantilever as indicated in figure 2.…”
Section: Methodsmentioning
confidence: 99%
“…We then extracted the gap width by combining the position data of the fiber with a measurement of the cantilever profile. It might be noted that, if one desires an electronic device, the gap width could be actively controlled using several methods, one of which is described by [32]. Figure 4a illustrates how the photoluminescence (PL) spectrum changes with position along the cantilever as indicated in figure 2.…”
Section: Methodsmentioning
confidence: 99%