Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition

Michihata, Masaki; Kim, Jonggang; Takahashi, Satoru; Takamasu, Kiyoshi; Mizutani, Yasuhiro; Takaya, Yasuhiro

doi:10.1007/s41871-018-0004-0

Cited by 13 publications

(4 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, the scanning measurement can be realized by measuring the standing wave field close to the surface [129]. Furthermore, to observe the micro-texture of the surface, the laser-trapped glass sphere can be used as a lens [130]. Thus, the laser-trapping-based probe can perform different measurement modes in one microprobe system.…”

Section: Laser-trapping-based Microprobe By Osaka Umentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

Self Cite

View full text Add to dashboard Cite

Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

show abstract

Section: Laser-trapping-based Microprobe By Osaka Umentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

Self Cite

View full text Add to dashboard Cite

show abstract

“…Therefore, the methods for cutting edge radius measurement should have a nanometric measurement accuracy in both lateral and vertical directions [11]. Optical methods can conduct fast and non-contact measurements [12][13][14]. However, a lateral resolution that is larger than 10 nm is limited by the optical diffraction phenomenon which occurs around the cutting edge when an optical method is used to measure the geometry of the diamond tool.…”

Section: Introductionmentioning

confidence: 99%

High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact

et al. 2020

View full text Add to dashboard Cite

This paper presents a measurement method for high-precision cutting edge radius of single point diamond tools using an atomic force microscope (AFM) and a reverse cutting edge artifact based on the edge reversal method. Reverse cutting edge artifact is fabricated by indenting a diamond tool into a soft metal workpiece with the bisector of the included angle between the tool’s rake face and clearance face perpendicular to the workpiece surface on a newly designed nanoindentation system. An AFM is applied to measure the topographies of the actual and the reverse diamond tool cutting edges. With the proposed edge reversal method, a cutting edge radius can be accurately evaluated based on two AFM topographies, from which the convolution effect of the AFM tip can be reduced. The accuracy of the measurement of cutting edge radius is significantly influenced by the geometric accuracy of reverse cutting edge artifact in the proposed measurement method. In the nanoindentation system, the system operation is optimized for achieving high-precision control of the indentation depth of reverse cutting edFigurege artifact. The influence of elastic recovery and the AFM cantilever tip radius on the accuracy of cutting edge radius measurement are investigated. Diamond tools with different nose radii are also measured. The reliability and capability of the proposed measurement method for cutting edge radius and the designed nanoindentation system are demonstrated through a series of experiments.

show abstract

“…For imaging applications, the magnification property of the PS microsphere in liquid was investigated using optical tweezers [26]. An optically trapped SiO 2 microsphere was utilized for surface imaging in air condition [27]. More recently, a localized plasmonic structural illumination microscopy, together with an optically trapped PS and TiO 2 bead, in which fluorescent objects were used, was developed as a new microscopy technique with 7-11 times improvements of full width at half maximum (FWHM) compared with the result using only the objective [28].…”

Section: Introductionmentioning

confidence: 99%

Selecting a Proper Microsphere to Combine Optical Trapping with Microsphere-Assisted Microscopy

Liu

Tang

et al. 2020

Applied Sciences

View full text Add to dashboard Cite

Microsphere-assisted microscopy serves as an effective super-resolution technique in biological observations and nanostructure detections, and optical trapping is widely used for the manipulation of small particles like microspheres. In this study, we focus on the selection of microsphere types for the combination of the optical trapping and the super-resolution microsphere-assisted microscopy, by considering the optical trapping performances and the super-resolution imaging ability of index-different microspheres in water simultaneously. Finally, the polystyrene (PS) sphere and the melamine formaldehyde (MF) sphere have been selected from four typical index-different microspheres normally used in microsphere-assisted microscopy. In experiments, the optically trapped PS/MF microsphere in water has been used to achieve super-resolution imaging of a 139 nm line-width silicon nanostructure grating under white light illumination. The image quality and the magnification factor are affected by the refractive index contrast between the microspheres and the immersion medium, and the difference of image quality is partly explained by the photonic nanojet. This work guides us in selecting proper microspheres, and also provides a label-free super-resolution imaging technique in many research fields.

show abstract

Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition

Cited by 13 publications

References 17 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact

Selecting a Proper Microsphere to Combine Optical Trapping with Microsphere-Assisted Microscopy

Contact Info

Product

Resources

About