Surface investigations by scanning thermal microscopy

Stopka, M.

doi:10.1116/1.588094

Cited by 28 publications

(14 citation statements)

References 4 publications

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“…Oesterschulze and coworkers (27)(28)(29) fabricated coaxial thermocouple probes by using a similar technique, and they used it both for STM and SThM by the experimental setup shown in Figure 20. A modulated laser beam was focused on the tip and used to heat the thermocouple junction.…”

Section: Wire Thermocouple Afm Probesmentioning

confidence: 99%

Scanning Thermal Microscopy

Majumdar

1999

Annu. Rev. Mater. Sci.

512

464

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This chapter presents a review of the technology of scanning thermal microscopy (SThM) and its applications in thermally probing micro-and nanostructured materials and devices. We begin by identifying the parameters that control the temporal and temperature resolution in thermometry. The discussion of SThM research is divided into three main categories: those that use (a) thermovoltage-based measurements, (b) electrical resistance techniques, and (c) thermal expansion measurements. Within each category we describe numerous techniques developed for (a) the method of probe fabrication, (b) the experimental setup used for SThM, (c) the applications of that technique, and (d) the measurement characteristics such as tip-sample heat transfer mechanism, spatiotemporal resolution, and interpretation of data for property measurements. Because most of the SThM techniques require fundamental knowledge of tip-sample heat transfer, all possible heat transfer mechanisms are discussed in depth, and relations for estimating the tip-sample conductance for each mechanism are provided. This is critical because tip-sample heat transfer controls spatial resolution, temperature accuracy and resolution, and imaging artifacts. Based on this discussion, a simple model is given for future design of SThM probes. The review concludes by describing some new developments on the applications of near-field optical microscopy for temperature measurements.

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Section: Wire Thermocouple Afm Probesmentioning

confidence: 99%

Scanning Thermal Microscopy

Majumdar

1999

Annu. Rev. Mater. Sci.

512

464

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“…To our knowledge, Williams and Wickramasinghe 7 were the first to demonstrate the idea of using a microscopic thermocouple to measure changes in probe temperature as the probe was scanned over a surface. Similar devices that were based on similar principles were built by others [8][9][10][11] and were demonstrated under ambient conditions.…”

Section: Introductionmentioning

confidence: 99%

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

2016

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Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides subdiffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that are measured in tens of nanometers. For the instrument this poses two major challenges: 1) how to measure the distance to the sample? and 2) how to position accurately and at high speed? For the first challenge near-field thermal radiation is proposed as a mechanism for an integrated distance sensor (patent pending). This sensor is realized by making a sensitive calorimeter (accuracy of 2.31 nW root sum squared). When used for distance measurement an equivalent uncertainty of 1 nm can be achieved for distances smaller than 100 nm. By scanning the distance sensor over the sample, thermal profilometry is realized, which can be used to inspect surfaces in a non-intrusive and non-contact way. This reduces wear of the probe and minimizes the likelihood of damaging the sample.

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“…The scanning tunneling microscope (STM) was the first device designed for thermal measurement at the sub-micrometer level and allowed a spatial resolution at about 100 nm, see [1] . Improved thermocouple tips were developed by Stopka and Oesterschulze to improve measurement performances, see [2] and [3] . A limitation of these devices is that they must operate on electrically conductive sample surfaces.…”

Section: Introductionmentioning

confidence: 99%