Surface Microanalysis by Low-Energy Ion Scattering

Abstract

Low-energy ion scattering (LEIS) has gained new capabilities and now provides high-end instrumentation for real-world surface analytical applications. Although the technique has been available for some decades, recent developments in instrumentation make the unique capabilities of LEIS accessible for everyday applications. Special ion energy analyzer designs allow LEIS to be used for non-destructive quantitative analysis of the elemental composition of the outermost atomic layer with high sensitivity and high mass resolution. At the same time, the composition of the first 10 nm of sub-surface material is also assessed. Applications are very broad, ranging from catalysts to various thin films to polymers.

Review—Ion Scattering as a Surface Analytical Tool for the Study of Passive Layers

“…About 10 years ago ISS has been developed to a method for application of product control in some fields of industry like atomic layer deposition and the elemental composition of inorganic and organic films. 59 It also has the potential of an analytical method in corrosion research. Its monolayer depth resolution is very special and thus is a good tool for elemental depth profiling of thin layers.…”