Surface micromachined electrostatically actuated micro peristaltic pump

Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu‐Chong

doi:10.1039/b403906h

Cited by 134 publications

(112 citation statements)

References 16 publications

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“…In this sense it is a smart system as it responds to electrical nerve stimulation and is mobilized intelligently to varying needs. Exploiting this principle of peristalsis, an electrostatically-actuated, biomimetic, micro-peristaltic pump has also been designed and fabricated by Xie et al [3]. A microfluidic peristaltic pump has further been developed by Thomas and Dorrer [4].…”

Section: Introductionmentioning

confidence: 99%

Transverse magnetic field driven modification in unsteady peristaltic transport with electrical double layer effects

Tripathi

Bhushan

Bég

2016

Colloids and Surfaces A: Physicochemical and Engineering Aspect

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The influence of transverse magnetic field on time-dependent peristaltic transport of electrically-conducting fluids through a microchannel under an applied external electric field with induced electric field effect is considered, based on lubrication theory approximations.The electrohydrodynamic (EHD) problem is also simplified under the Debye linearization.Closed-form solutions for the linearized dimensionless boundary value problem are derived.With increasing Hartmann number, the formation of bolus in the regime (associated with trapping) is inhibited up to a critical value of magnetic field. Flow rate, axial velocity and local wall shear stress are strongly decreased with greater Hartmann number whereas pressure difference is enhanced with higher Hartmann number at low time values but reduced with greater elapse in time. With greater electro-osmotic parameter (i.e. smaller Debye length), maximum time-averaged flow rate is enhanced, whereas the axial velocity is reduced. An increase in electrical field parameter (i.e. maximum electro-osmotic velocity) causes an increase in maximum time-averaged flow rate. The simulations find applications in electromagnetic peristaltic micro-pumps in medical engineering and also "smart" fluid pumping systems in nuclear and aerospace industries.

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Section: Introductionmentioning

confidence: 99%

Transverse magnetic field driven modification in unsteady peristaltic transport with electrical double layer effects

Tripathi

Bhushan

Bég

2016

Colloids and Surfaces A: Physicochemical and Engineering Aspect

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“…In such devices, a series of diaphragms are actuated in sequence in a manner emulating wave-like muscle contractions of a tube-shaped organ, resulting in forward motion of fluids. We have previously demonstrated a surface-micromachined, electrostatically actuated peristaltic pump [10], which will be the subject of this simulation study.…”

Section: Introductionmentioning

confidence: 99%

“…While the basic concept is applicable to general peristaltic micropumps, the study will focus on a surface-micromachined device (figure 1) [10]. Three compliant diaphragms are each located in a thin pumping cell and are actuated electrostatically in a peristaltic sequence to mobilize the fluid.…”

Section: Introductionmentioning

confidence: 99%

Dynamic simulation of a peristaltic micropump considering coupled fluid flow and structural motion

Lin¹,

Yang²,

Xie³

et al. 2006

J. Micromech. Microeng.

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This paper presents lumped-parameter simulation of dynamic characteristics of peristaltic micropumps. The pump consists of three pumping cells connected in series, each of which is equipped with a compliant diaphragm that is electrostatically actuated in a peristaltic sequence to mobilize the fluid. Diaphragm motion in each pumping cell is first represented by an effective spring subjected to hydrodynamic and electrostatic forces. These cell representations are then used to construct a system-level model for the entire pump, which accounts for both cell-and pump-level interactions of fluid flow and diaphragm vibration. As the model is based on first principles, it can be evaluated directly from the device's geometry, material properties and operating parameters without using any experimentally identified parameters. Applied to an existing pump, the model correctly predicts trends observed in experiments. The model is then used to perform a systematic analysis of the impact of geometry, materials and pump loading on device performance, demonstrating its utility as an efficient tool for peristaltic micropump design.

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“…The sacrificial photoresist layers were hard-baked at 120 C after lithography if applicable for edge-smoothening and degassing purposes. All parylene C layers were slightly roughened by a short period of oxygen plasma treatment in order to both reduce stiction [11] and promote adhesion in between each structural layer [19] in the fabricated devices. Cleaning procedures were also carefully taken on wafers before every parylene coating for stronger interlayer adhesion.…”

Section: Fabricationmentioning

confidence: 99%

Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation

Chen

Rodger

Meng

et al. 2007

J. Microelectromech. Syst.

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Abstract-This paper presents the world's first surface-micromachined parylene dual-valved microfluidic system for on-chip unpowered microflow regulation. Incorporating a normally closed and a normally open passive check valve in a back-to-back configuration inside a microchannel, the dual-valved system has successfully regulated the pressure/flow rate of air and liquid without power consumption or electronic/magnetic/thermal transduction. By exclusively using parylene C (poly-para-xylylene C) as the structural material, the fabricated valves have higher flexibility to shunt flows in comparison to other conventional thin-film valves. A state-of-the-art multilayer polymer surface-micromachining technology is applied here to fabricate parylene microvalves of various designs. The parylene-based devices are completely biocompatible/implantable and provide an economical paradigm for fluidic control in integrated lab-on-a-chip systems. Design, fabrication, and characterization of the parylene dual valves are discussed in this paper. Testing results have successfully demonstrated that the microflow regulation of the on-chip dual-valved system can achieve a bandpass profile in which the pressure control range is 0-50 mmHg with corresponding flow rates up to 2 mL/min for air flow and 1 L/min flow rate for water flow. This regulation range is suitable for controlling biological conditions in human health care, with potential applications including drug delivery and regulation of elevated intraocular pressure (IOP) in glaucoma patients.[

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Surface micromachined electrostatically actuated micro peristaltic pump

Cited by 134 publications

References 16 publications

Transverse magnetic field driven modification in unsteady peristaltic transport with electrical double layer effects

Transverse magnetic field driven modification in unsteady peristaltic transport with electrical double layer effects

Dynamic simulation of a peristaltic micropump considering coupled fluid flow and structural motion

Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation

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