Surface micromachined force gauges: uncertainty and reliability

Wittwer, Jonathan W.; Gomm, Troy; Howell, Larry L.

doi:10.1088/0960-1317/12/1/303

Cited by 37 publications

(42 citation statements)

References 11 publications

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“…By contrast, note that φ (3) n and φ (4) n are determined from the second and the third parts of equation (3.23) only up to the addition of an arbitrary multiple of φ (1) n . Here, we solve for φ (2) n , φ (3) n and φ (4) n using the method of variation of parameters in terms of the basis functions…”

Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 97%

“…Here, we solve for φ (2) n , φ (3) n and φ (4) n using the method of variation of parameters in terms of the basis functions…”

Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 99%

“…We make the choices of φ (3) n and φ (4) n unique (cf. [46]) by setting the initial condition for the coefficient functions for β 4 to 0.…”

Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 99%

“…This choice results in a non-degenerate set of differential-algebraic equations of index-2. Note that the continuity conditions for u 3 , u 4 and u 5 imply the compatibility conditions for the rotations of the cross sections, the bending moment and the shear force, respectively [48,49].…”

Section: (B) Spatial and Temporal Discretizationmentioning

confidence: 99%

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Nonlinear tuning of microresonators for dynamic range enhancement

2015

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This paper investigates the development of a novel framework and its implementation for the nonlinear tuning of nano/microresonators. Using geometrically exact mechanical formulations, a nonlinear model is obtained that governs the transverse and longitudinal dynamics of multilayer microbeams, and also takes into account rotary inertia effects. The partial differential equations of motion are discretized, according to the Galerkin method, after being reformulated into a mixed form. A zeroth-order shift as well as a hardening effect are observed in the frequency response of the beam. These results are confirmed by a higher order perturbation analysis using the method of multiple scales. An inverse problem is then proposed for the continuation of the critical amplitude at which the transition to nonlinear response characteristics occurs. Pathfollowing techniques are employed to explore the dependence on the system parameters, as well as on the geometry of bilayer microbeams, of the magnitude of the dynamic range in nano/microresonators.

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Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 97%

“…Here, we solve for φ (2) n , φ (3) n and φ (4) n using the method of variation of parameters in terms of the basis functions…”

Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 99%

“…We make the choices of φ (3) n and φ (4) n unique (cf. [46]) by setting the initial condition for the coefficient functions for β 4 to 0.…”

Section: Perturbation Analysis For Single-layer Microbeamsmentioning

confidence: 99%

Section: (B) Spatial and Temporal Discretizationmentioning

confidence: 99%

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Nonlinear tuning of microresonators for dynamic range enhancement

2015

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“…The complete force/deflection relationship at a single input power level can be obtained by pulling the spring against the actuator until the actuator is pulled back to its zero-displacement position. A SEM image of an actuator and spring combination is shown in Figure 2 force-gauge spring was designed using an uncertainty analysis technique to minimize the uncertainty in the spring constant due to variations in the process [22].…”

Section: Output Force Vs Input Current and Displacementmentioning

confidence: 99%

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

Walraven¹,

Baker²,

Headley³

et al. 2004

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Thermal actuators have proven to be a robust actuation method in surface-micromachined MEMS processes. Their higher output force and lower input voltage make them an attractive alternative to more traditional electrostatic actuation methods. A predictive model of thermal actuator behavior has been developed and validated that can be used as a design tool to customize the performance of an actuator to a specific application. This tool has also been used to better understand thermal actuator reliability by comparing the maximum actuator temperature to the measured lifetime.Modeling thermal actuator behavior requires the use of two sequentially coupled models, the first to predict the temperature increase of the actuator due to the applied current and the second to model the mechanical response of the structure due to the increase in temperature. These two models have been developed using Matlab for the thermal response and ANSYS for the structural response. Both models have been shown to agree well with experimental data. 3In a parallel effort, the reliability and failure mechanisms of thermal actuators have been studied. Their response to electrical overstress and electrostatic discharge has been measured and a study has been performed to determine actuator lifetime at various temperatures and operating conditions. The results from this study have been used to determine a maximum reliable operating temperature that, when used in conjunction with the predictive model, enables us to design in reliability and customize the performance of an actuator at the design stage. AcknowledgmentThe authors would like to thank all of the staff in the MDL for fabrication and release/dry/coat support through out this project. We would also like to thank Ken Pohl, Mark Jenkins and David Luck for their assistance in testing and characterization, Mike Rye for TEM sample preparation, and Hoshang (Amir) Shahvar and Ted Parson for their work in getting SHiMMeR operational and configured for this experiment. Also, thanks to Sean Kearney and Leslie Phinney for their work in collecting the Raman temperature data.4

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A Mechanism Approach for Enhancing the Dynamic Range and Linearity of MEMS Optical Force Sensing

Wiens¹,

Roman²

2011

Signal Measurement and Estimation Techniques for Micro and Nanotechnology

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Surface micromachined force gauges: uncertainty and reliability

Cited by 37 publications

References 11 publications

Nonlinear tuning of microresonators for dynamic range enhancement

Nonlinear tuning of microresonators for dynamic range enhancement

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

A Mechanism Approach for Enhancing the Dynamic Range and Linearity of MEMS Optical Force Sensing

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