International Conferencre on Simulation of Semiconductor Processes and Devices
DOI: 10.1109/sispad.2002.1034506
|View full text |Cite
|
Sign up to set email alerts
|

Surface mobility in silicon at large operating temperature

Abstract: In this paper, an experimental investigation on high-temperature carrier mobili t y in silicon inversion layers is carried o u t w i t h the aim of improving our understanding of car-

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
4
0

Publication Types

Select...
4
1

Relationship

1
4

Authors

Journals

citations
Cited by 5 publications
(4 citation statements)
references
References 8 publications
0
4
0
Order By: Relevance
“…Within the cylindrical structure, the total charge is twice as large as that of a DG structure, and, for low gate voltages, electrons distribute farther from the interface leading to an enhanced mobility. The mobility model of [9] has been implemented in our DD solver.…”
Section: Resultsmentioning
confidence: 99%
“…Within the cylindrical structure, the total charge is twice as large as that of a DG structure, and, for low gate voltages, electrons distribute farther from the interface leading to an enhanced mobility. The mobility model of [9] has been implemented in our DD solver.…”
Section: Resultsmentioning
confidence: 99%
“…The conductivity of a semiconductor is directly proportional to the product of carrier concentration and carrier mobility. Whenever all the things are equal, higher mobility leads to better device performance [3]. Carrier bounces around and regularly changes direction and velocity in the semiconductor because of the scattering.…”
Section: Introductionmentioning
confidence: 99%
“…The typical drift velocity in the semiconductor is less than a typical thermal velocity which is a round 10 +7 cm/s at room temperature. The carrier motion is shown in the Figure 1 when the electric fields are applied or without it in the semiconductor [3]. The carrier motions are occurred randomly and quickly through the semiconductor when the electric field is not applied, otherwise a small difference when the electric field applied there is a net motion along the field.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation