The molecular beam
epitaxy (MBE) technique is renowned as the most
suitable for the growth of high-quality crystalline materials and
nanostructures such as GaAs. However, once established, optimal growth
parameters required for repeatability of top-quality structures may
be easily lost as MBE is highly sensitive to any changes in the system.
Especially, routine servicing procedures, which include any activity
which requires unsealing of the growth chamber, are devastating for
developed growth parameters and force the necessity of recalibration.
In this work, we present the process of growth parameter pre-optimization
for obtaining homoepitaxial GaAs layers after servicing and restarting
the MBE system. Namely, we present how each step of reestablishing
optimal growth condition influences various characteristics of obtained
GaAs layers. Those include in situ, structural, and spectral measurement
techniques. An additional aspect was to compare the optimal conditions
for the growth of homoepitaxial GaAs layers from two growth campaigns
in which the main difference is the addition of an ion pump and increasing
the temperature gradient on the Ga cell.