Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon

Xia, Jingjing; Yu, Jun; Siwen, Lu; Huang, Qiushi; Xie, Cheng; Wang, Zhanshan

doi:10.3390/ma15165641

Cited by 13 publications

(5 citation statements)

References 41 publications

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“…Both sides of the Si wafer were mechanically polished (MP), obtaining optically specular surfaces. Finally, one side was finished by chemical mechanical polishing (CMP), obtaining an atomically flat defect-free surface [20]. Before their use, substrates were cleaned by acetone vapors to remove possible physical/chemical contaminants.…”

Section: Silicon Substratesmentioning

confidence: 99%

Morphology and Mechanics of Star Copolymer Ultrathin Films Probed by Atomic Force Microscopy in the Air and in Liquid

Albonetti,

Izzo,

Vigliotta

et al. 2024

Materials

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Star copolymer films were produced by using spin-coating, drop-casting, and casting deposition techniques, thus obtaining ultrathin and thick films, respectively. The morphology is generally flat, but it becomes substrate-dependent for ultrathin films where the planarization effect of films is not efficient. The indentation hardness of films was investigated by Force Volume Maps in both the air and liquid. In the air, ultrathin films are in the substrate-dominated zone and, thus, the elastic modulus E is overestimated, while E reaches its bulk value for drop-casted ultrathin and thick films. In liquid (water), E follows an exponential decay for all films with a minimum soaked time t0 of 0.37 and 2.65 h for ultrathin and drop-casted ultrathin and thick films, respectively. After this time, E saturates to a value on average 92% smaller than that measured in the air due to film swelling. Such results support the role of film morphology in the antimicrobial activity envisaged in the literature, suggesting also an additional role of film hardness.

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Section: Silicon Substratesmentioning

confidence: 99%

Morphology and Mechanics of Star Copolymer Ultrathin Films Probed by Atomic Force Microscopy in the Air and in Liquid

Albonetti,

Izzo,

Vigliotta

et al. 2024

Materials

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“…The development of a friction model was necessary considering that the total friction, F f between the lower millstone, seeds, and upper millstone in the grinding process has three distinct friction force components [23,31].…”

Section: Friction Modelingmentioning

confidence: 99%

Study of the Grinding Process by Friction of Cereal Grains in Stone Mills

Ilie,

Cotici,

Hristache

2023

Processes

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The grinding process via friction at the micro-scale in a mill with stones is considered a variable combination of contacts, with two-body (the asperities of lower millstone in direct contact with the asperities of upper millstone) and three-body (micro-particles of ground seeds trapped between the asperities of lower and upper stones of the mill) contacts. Three elements are described: (1) the mechanical contact of the asperities of the lower and upper millstones to predict pressures on asperities by modeling; (2) tests on a millstone sample covered with grinding particles; and (3) tests on a wafer sample formed by the millstones with the grinding particles between them. This paper highlights the combined effects of the micro-scale friction via individual measurements, using an analytical model to sum these effects and validating the model by performing several experiments. An efficiency grind by friction assumes the grain’s movement and interaction between the seeds and solid surfaces, and is highlighted through theoretical and experimental studies. Topography analysis of the surface of the millstones reveals the model of microscopic frictional force. Endpoint measurements (the traces of the surface topography evolution) enable model verification in the grinding process. Thus, the results obtained in the grinding process in the stone mills via friction have practical utility through research benefits. Therefore, they allow for the improvement of quality, reliability, flexible grinding, quality control of the flours, and uniformity degree (fineness/shredding).

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“…The development of a friction model was necessary considering that the total friction between the lower millstone, seeds, and upper millstone in the grinding process has three distinct friction force components [15,17].…”

Section: Friction Modelingmentioning

confidence: 99%

Modeling the Grinding Process of the Cereal Grains as a Result of Friction in the Millstones

Ilie,

Cotici,

Hristache

2023

Preprint

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The grinding process by friction at the micro-scale in a mill with stones is considered a variable combination of contacts: with two-body (the asperities of lower millstone in direct contact with the asperities of upper millstone) and the three-body (micro-particles of ground seeds trapped between the asperities of lower and the upper stones of the mill). Three elements are described: (1) the mechanic contact of the asperities of the lower and upper millstone, to predict pressures on asperities, by modeling; (2) tests on a millstone sample covered with grinding particles, and (3) tests on a wafer sample formed by the millstones with the grinding particles between them. The paper highlights the combined effects of the micro-scale friction by individual measurements and to sum these effects an analytical model was used, and to validate the model, several experiments were performed. A suitable grind by friction assumes the grain’s movement and the interaction between the seeds and solid surfaces and is highlighted through theoretical and experimental studies. Topography analysis of the surface of the millstones revealed the model of microscopic frictional force. Endpoint measurements (the traces of the surface topography evolution), enable model verification in the grinding process.

show abstract

Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon

Cited by 13 publications

References 41 publications

Morphology and Mechanics of Star Copolymer Ultrathin Films Probed by Atomic Force Microscopy in the Air and in Liquid

Morphology and Mechanics of Star Copolymer Ultrathin Films Probed by Atomic Force Microscopy in the Air and in Liquid

Study of the Grinding Process by Friction of Cereal Grains in Stone Mills

Modeling the Grinding Process of the Cereal Grains as a Result of Friction in the Millstones

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