Surface Morphology of AlN Layers Grown on a Nano-Structured SiNx/Si(100) Template

Bessolov, V. N.; Konenkova, E. V.; Rodin, S. N.; Solomnikova, A. V.

doi:10.1134/s1063782624040031

Semiconductors

2024

DOI: 10.1134/s1063782624040031

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Surface Morphology of AlN Layers Grown on a Nano-Structured SiNx/Si(100) Template

V. N. Bessolov,

E. V. Konenkova,

S. N. Rodin

et al.

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Surface Morphology of AlN Layers Grown on a Nano-Structured SiNx/Si(100) Template

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References 19 publications

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